VFS

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

/ Elbow type Seal method: Gasket seal For M5, 10-32UNF D3 Applicable tubing O.D. d D1 A L4 L3 M T H (Width across flats) L1 L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS12l1FG-M5-02A 2 5.8 15.8 20.3 11.9 AS12l1FG-U10/32-02A AS12l1FG-M5-23A 3.2 7.2 16.9 5 AS12l1FG-U10/32-23A AS12l1FG-M5-04A 4 8.2 AS12l1FG-U10/32-04A AS12l1FG-M5

CV/MVGQ

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.

CV/MVGQ

1 CEP1 Basic Style (B) CE1 CVJ5 CE2 ML2B M5 x 0.8 M5 x 0.8 C J G5-S CV MVGQ M5 x 0.8 CC 53.5 [54.5] Manual override 28 [34.5] RB J Width across flats B1 D-X Rod End Nut 20Bore size (mm) B l H l S + Stroke Z + Stroke 10 7 3.2 Data 16 8 4 [ ]: Denotes the values of AC.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in One-touch fittings Component

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in One-touch fittings Courtesy

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

Table of Contents

The lead wire entry is on D side (LD) in this case. 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

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M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

Compact 5-Port Solenoid Valve

Symbol Mounting Nil Direct mounting Dm DIN rail mounting 18 18 stations 08 8 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used on all manifold stations. The use of a 2-position single solenoid will result in an unused control signal.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 7 12.7 9.6 12.3 28.6 25.8 25 22.2 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 17.3 17.3 3.2 22.1 8.4 22.1 9.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 28.6 25.8 25 22.2 21.3 26.1 4 7 9.6 7 16.5 8 11.4 9.3 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 25 22.2 9.6 AS121F-M5

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

KB

Style Tube size/ Connecting female thread size Body size KBV1-M5 KBV1-M6 KBV2-M5 M5 X 0.8 M6 X 1 M5 X 0.8 M6 X 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 KBV3-12 12 KBV4-12 KBV4-16 Tube O.D. Part No.

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Compact Cylinder with Lock Series CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152 31 42 86 108 119 141 100 87.5 75 125 150 175 50 62.5 125 112.5 137.5 162.5 98

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 3.2 19.8 8.4 17.5 28.7 12.7 M5 x 0.8 8 8 4 20.3 33.8 28.8 30.1 25.1 9.3 9.6 9.3 10.8 6 21.4 20.6 31.8 13.5 11.6 3.2 24.4 8.4 17 17.5 30.9 12.7 9.3 13.1 4 24.9 9.3 35.2 30.2 32.1 27.1 12 R 1/8 14.2 18 22.9 36.3 13.5 10.9 6 14 26.9 11.6 21