Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

LJ1H

60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 18 19 Standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303PD Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Mounting (Male thread) M5 x 0.8 Vacuum entry port Mounting Connection 20 M8 x 1 Female thread Male thread 10 to 16 24 M10 x 1 M8 x 1 20 to 32 10 to 16 55 M14 x 1 M10 x 1 M5 x 0.8 40, 50 20 to 32 Pad diameter (mm) M14 x 1 40, 50 Ball joint rotation 15 Pad Type Pad form Ball joint type Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 Material Urethane rubber NBR Silicon rubber Fluoro rubber

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Internal hold External hold MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure 0.6MPa Pressure 15 15 Holding force (N) 0.6MPa Holding force (N) 0.5MPa 0.5MPa External hold 10 10 0.4MPa 0.4MPa 0.3MPa 0.3MPa 5 5 0.2MPa 0.2MPa 0 10 20 30 40 50 0 10 20 30 40 50 L L Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 Pressure 0.6MPa 30 30 Internal hold Pressure 0.6MPa 0.5MPa

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

CLQ

CLQ 157 245 402 629 982 1559 2513 3927 M5 x 0.8 Rc 1/8 Rc 1/4 MLGP Symbol Specifications Equivalent to 0.5 MPa -XA Change of rod end shape RLQ Standard Stroke MLU Bore size (mm) Standard stroke (mm) 20, 25 32, 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 ML1C DManufacture of Intermediate Stroke -X Description Part no.

Series SV

Response time 5 (EA) 1 (P) 3 (EB) Response time ms at 0.5MPa (72.5psi) Type of actuation 3 position pressure center SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 2 position single 11 or less 25 or less 28 or less 40 or less 2 position double 10 or less 17 or less 26 or less 40 or less 3 position 18 or less 29 or less 32 or less 82 or less 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve 15 or less

MHF2

5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (mounting hole) 27 25 25 M5 x 0.8 2-7.5 1.2 1.2 Finger opening port E-E +0.1 0 Close: 0 Open: 161 4-M5 x 0.8 thread depth 5.5 Mounting thread 36 8-M4 x 0.7 thread depth 4 Attachment mounting thread Groove for auto switch mounting 20 43 2.2 2-3H9 +0.025 0 depth 3 4 15 5 15 5 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread

CJ2X/CUX/CQSX/CQ2X/CM2X

, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed

CJ2X/CUX/CQSX/CQ2X/CM2X

, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed

Stainless Steel One-touch Fittings Series KG

Nylon Urethane L3 D1 D2 L1 L2 M M5 0.8 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 2.9 8 10.4 13.4 22 16 1 8 M5 0.8 7 15 26 24 30 47 40 49 63 80 18.5 26.5 31 28.5 31.5 36.5 35.5 36.5 38.5 41.5 9.8 13.4 23.5 24 12 15 14.5 22.5 18.5 25 8 1 8 17 12.8 15.3 23.5 6 7.5 7.5 1 4 10

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

fitting (A, B port) 20 15 B B 5 1.5 2n-M5 0.8 (A, B port) (Pitch) P=10.5 15.7 Other dimensions are the same as the M5T.

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

Modular Design with Uniform Body Style

/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

Wedge Cam Operation Gripper Series MHK2

40 0.4MPa 30 0.4MPa 30 0.3MPa 20 0.3MPa 20 0.2MPa 10 10 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L mm Holding point L mm MHKL2-25D MHKL2-25D 100 120 Pressure 0.6MPa 100 80 Pressure 0.6MPa Holding force N Holding force N 0.5MPa 80 60 0.5MPa 0.4MPa 60 0.4MPa 40 0.3MPa 40 0.2MPa 0.3MPa 20 20 0.2MPa 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L mm Holding point L mm 15 15 Series