Series VQ Metal Seal/Rubber Seal Body Ported

(S=10mm2) Cylinder stroke 300mm Series CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-08 (S=10mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-08 (S=10mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 8 14.6 (0.81) VQ2000 (Metal seal) 8 16.2

IIIIIII

) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O

KA

(mm) Fitting size d Soft nylon Polyurethane D L A M Part No. 3.2 9.6 18.5 17.5 18 4 33.5 34.5 36.5 18.5 15.5 KAR23-04 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 39.5 37 39.5 10 KAR04-10 3.3 2.5 KAR06-08 8 18.5 6 17 12.8 KAR06-12 42 4.7 12 20 10 KAR06-10 13.1 13.1 3.0 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L2 L1 K J M N t W H E LQ2P2A 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 14.5 LQ2P2B LQ2P2C 18 6 7 31 19.9 19 16 73 LQ2P5B LQ2P5A LQ2P4B LQ2P4A LQ2P3B LQ2P3A 36 83 20.5 24 6 7 26.2 22 24 42 34.5 95 82 24.5 21 30 9 7 33.1 28 30 49 40 110 93 (E) shows the approximate dimension of the inserted tubing from the end of the nut.

CE2

BT-08 63 CC 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 RB 100 25 to 750 25 to 600 Up to 1100 Up to 850 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M (kg) Weight J 40 50 63 80 100 Bore size (mm) DBasic style 2.18 3.39 5.29 8.66 12.09 BA-04 BA-05 BA-06 BA-08 BA-10 Foot style 2.37 3.61 5.63 9.33 13.08 -X Flange style 2.55 3.84 6.08 10.11 14.01 Basic weight

Air Cylinder Series MB

42 53 53 73 73 90 9 9 10.5 10.5 12.5 12.5 13 MB-B03 MB-B05 MB-B08 MB-B12 Rotating angle Mounting plate Model without air cushion is designed to include rubber bumpers.

Sine Cylinder Series REC

-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (

Vacuum System Peripherals:

42 e Valve Model Fill in the blanks below with symbols of necessary specifications.

SMC Electronic Switch Series Variations

DIN rail center 70 (94.4) 100 70 (94.4) 100 90 10 SUP 40 (4.5) 30 Adjusting knob Electrical entry Applicable O.D. 6.5 to 8.5 12 Electrical entry Applicable O.D. 6.5 to 8.5 Bracket Gauge 35 42 8-4.5 Gauge 34 42 4-4.5 42 9-M3 OUT1 OUT2 OUT3 Bracket OUT5 OUT4 EXH port EXH port Station 1 n 69.3(MAX74.4) 69.3(MAX.74.4) 60 OUT 60 19.5 2.1 OUT OUT OUT OUT OUT OUT GND OUT6 19.5 2.1 VCC Detection

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 01 (Rc1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: N7 (1/4" One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: N7N (1/4" One-touch Fitting NPT)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: N7T (1/4" One-touch Fitting)

Piping: Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: Rc1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPT 1/8