NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Optional accessory Blank plate ass'y: DXT199-22-1A EXH Relocation Spacerl DXT199-29-2TA SUP Relocation Spacar: (only for type 41, 42, 43): DXTl99-35-1TA 20 stations NVVsZs41-168'1.OlT --TStations a lf there are mof6 than 10 stations, supply 6ir and exhaust frctn both sid6s of manitold. NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

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Optional accessory Blank plate ass'y: DXT199-22-1A EXH Relocation Spacerl DXT199-29-2TA SUP Relocation Spacar: (only for type 41, 42, 43): DXTl99-35-1TA 20 stations NVVsZs41-168'1.OlT --TStations a lf there are mof6 than 10 stations, supply 6ir and exhaust frctn both sid6s of manitold. NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

C95Series

HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

40.5 42 38.5 40 44 37 43 24 (36) 27.5 (39.5) 25.5 (37.5) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 63 50.5 50.5 50 47.5 42 38.5 40 44 37 43 32 (46) 33.5 (42.5) 30.5 (44.5) 80 59 48 49.5 46.5 32 (46) 33.5 (47.5) 30.5 (44.5) 100 69.5 48 49.5 46.5 ( ): Denotes the values of long strokes. 8-21-34 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height/End Lock

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

Air Cylinder Series MB

(mm) Auto switch model Bore size 50 63 80 100 125 32 40 D-A3/A44 D-G39/K39 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BMB2-032 BS1-125 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5F D-F5BAL D-F5NTL BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-P5DWL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL BMB3T-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 BAP2T-080 BMB4-032 BMB4-050 BMB4-050

7.4

fitting assembly 2n x C4 C4: 4 One-touch fitting assembly L1 L2 L3 4.5 67 1.7 3 Mounting hole for M3 67 1.7 4.5 P=11 15.5 Mounting hole for M2.5 (3.5) (30) 5.5 46.5 8 38 (14) 33 32.2 Residual pressure release manual override 11 Residual pressure release manual override 29.5 (17.5) 38 (22.5) 0.5 (43) 2.5 U side D side Stations 1 2 3 n DIN rail clamping screw 2n x C3, C4, M5 C3: 3.2 One-touch

RHC

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

EXxx-OMN0027CN

) PWR-LED () (43 ) -22No.EX-OMN0027CN-D PWR(V)-LED OFF () OFF () (43 ) SF-LED BF-LED OFF SF SI SI SI BF SI 0126 BF SF SF BF 1 SI 2 PLC BF (43 ) -23No.EX-OMN0027CN-D EX600-SPR1A EX600-SPR2A PROFIBUS DP(DP-V0) PROFIBUS DP 9.6/19.2/45.45/93.75/187.5/500 kbps 1.5/3/6/12 Mbps GSD (SMCB1411.gsd) (/) Max(512 /512 ) DC24 V Class 22 A (A ) () 80 mA /PNP() /NPN() 32 (8

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D 43 Order Made Specifications OUT SUP OUT Specifications/Content Symbol Clean room specifications 10 Copper-free specifications 20 Approx.

SYJA3000

(A) 4 (B) 2 (A) 4 (B) 2 0.6 SS5YJA5 The remainder of the manifold part number is called out the same as an SS5YJ5 0.5 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure range 3 position pressure center 0.4 (A) 4 (B) 2 Specify the part numbers for the valve(s), blank plate assembly and manifold base. 0.3 SS5YJA5-42-031-011 pc. SYJA5140 1 pc. SYJA5240 1 pc.

SQ1000/2000

08 Dual flow fitting SSQ1000-52AP. 39 P. 41 P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

LVQ

Replacement part type L shows the parts for LQ-GL and LQ-GM. 17-5-83 22 Series LVQ Special Tools Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM

Auto Switch Guide

BJ2 -010 BJ2 -016 BA-06 BA-08 BA-10 BA -01 BA -02 BA -32 BA -04 BM2 -020 BM2 -025 BM2 -032 BM2 -040 BA -05 BA -06 BA -08 BA -10 BA01 BA02 BA32 BMA2-050 BMA2-063 BMA2 -020 BMA2 -025 BMA2 -032 BMA2 -040 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available.

Applicable Auto Switch Model

(Tolerance 30%) 5.3-43 2 Color Indication Style Solid State Switch/Rail Mounting D-F79W/D-F7PW/D-J79W Applicable Actuator Series Grommet Series Bore size (mm) The suitable operating point can be indicated with a green light.

Modular F.R.L. Units

-X406 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 Proof pressure [MPa] 1.5 Drain capacity [cm3] 19 43 88 B dimension [mm]*1 108.6 137.1 167.2 169.2 254.2 Maximum operating pressure [MPa] 1.0 Set pressure range [MPa] *1 0.05 to 0.4 *1 For polycarbonate bowls.

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) To CYL port VP4 VQ 1/2 VQ 1/2 Dimensions VQ 4/5 Single unit Manifold VQC 1/2 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 VQZ M3 mounting hole M2.5 mounting hole SQ VFS VFR VQ7 Residual pressure release manual override DIN rail clamp screw Residual

Table of Contents

Output -43 Output -65 DC (+) DC (+) (Brown) (Brown) N.C.