Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

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D 43 Order Made Specifications OUT SUP OUT Specifications/Content Symbol Clean room specifications 10 Copper-free specifications 20 Approx.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS1002FS-23 3.2 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 36.4 33.9 11 15.4 8.8 10.1 13.5 13.6 15.1 5.5 9.6 5.2 AS1002FS-04 4 9.3 7.7 10 37.6 5.5 AS1002FS-06 6 11.6 9.7 12 40.1 6.1 12.8 37.4 34.9 12.3 6.6 AS2002FS-04 4 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 44.5 43 12.6 17 10.5 12.3 13.5 20 21.5 6.5 15 9.5 AS2002FS-06 6 11.6 9.7 12 43.1 10.4 AS2052FS-06 6 12.8 11.5 4.3 7.8 13 16 54.2 7.6

KN Series Nozzles for Blowing

Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 Weight (g) KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 43 43 61 61 94 94 84 84 117 117 183 183 O.D.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

ISO Standard Hydraulic Cylinder

Auto switch models Bore size (mm) 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W D-Z7/Z80 BS5-125 BMB5-032 BA7-040 BA7-040 BA7-063 CHQ CHK BT-12 BT-03 BT-04 BT-04 BT-06 CHN BS4-125 BMB4-032 BA4-040 BA4-040 BA4-063 Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

XL

How to Order Coil Assembly (DC for XSA) VX021 001 C B 05 Rated voltage Note1) Coil assembly 05 24VDC 06 12VDC Applications 6VDC 51 Size part no. Applicable Series 001 002 No.1 Solenoid No.2 Solenoid XSA1 XSA2 003 No.3 Solenoid XSA3 53 48VDC 100VDC 55 Note 1) If the leading "0" is removed from voltage symbols 05, 06, these are the same as the solenoid valve symbols.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Micro Mechanical Valve Series VM1000

g Roller plunger Polyacetal roller VM120-01-06A VM130-01-06A VM120U-01-06A VM130U-01-06A VM122-M5-06A VM132-M5-06A VM-06B 43 g Hard steel roller VM120-01-06SA VM130-01-06SA VM120U-01-06SA VM130U-01-06SA VM122-M5-06SA VM132-M5-06SA VM-06BS 45 g Cross roller plunger Polyacetal roller VM120-01-07A VM130-01-07A VM120U-01-07A VM130U-01-07A VM122-M5-07A VM132-M5-07A VM-07B 43 g Hard steel roller

Series KP/KPQ/KPG

Plug: KPP L A Applicable fitting size d Weight g D Model L A D d 6 32 13.8 0.4 KPP-04 4 Applicable fitting size 8 35 15.7 0.7 KPP-06 6 d 10 39 17.3 1.1 KPP-08 8 12 43 19.2 1.7 KPP-10 10 14 45.5 20.7 2.5 KPP-12 12 7 Series KPQ/KPG For Drive System Air Piping Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

Series KP/KPQ/KPG

Plug: KPP L A Applicable fitting size d Weight g D Model L A D d 6 32 13.8 0.4 KPP-04 4 Applicable fitting size 8 35 15.7 0.7 KPP-06 6 d 10 39 17.3 1.1 KPP-08 8 12 43 19.2 1.7 KPP-10 10 14 45.5 20.7 2.5 KPP-12 12 7 Series KPQ/KPG For Drive System Air Piping Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

KP/KPQ/KPG

Plug: KPP Applicable fitting size d Weight g D Model L A L A KPP-04 4 6 32 13.8 0.4 D d KPP-06 6 8 35 15.7 0.7 KPP-08 8 10 39 17.3 1.1 Applicable fitting size d KPP-10 10 12 43 19.2 1.7 KPP-12 12 14 45.5 20.7 2.5 4 For Drive System Air Piping Series KPQ/KPG Clean One-touch Fittings Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Plug: KPP Applicable fitting size d Weight g D Model L A L A 4 0.4 6 32 13.8 KPP-04 D d 6 15.7 0.7 8 35 KPP-06 8 10 39 17.3 1.1 KPP-08 Applicable fitting size d 10 12 19.2 1.7 43 KPP-10 12 2.5 14 45.5 20.7 KPP-12 The plug is commom for series KPQ, KPG and KP. 9

REC

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

Free Mount Cylinder

43 53 43 ZC(D)UKD32 ZC(D)UKR32 ZP 29 34 38 18.5 19.5 60.5 65.5 69.5 50 51 Note) ZPU-X11: Flat type only.

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

OMU0023

Step Request data Response data Operation details 1 01 06 0412 000A 01 06 0412 000A Sets Step Data No. 1 Positioning time to 0.1 sec. 01 10 0410 0002 2 01 10 0410 0002 Sets Step Data No. 1 Target position to 10 mm. 04 0 2710 (4) Return to Origin Change the Card Motor controller (controller ID1) operation mode to serial operation, and send a Return to Origin instruction.

CL

43 43 22 27 27 32 41 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 Note) In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than