Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: DO (DIN Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread: F (G), Option: F1 (Foot

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

N11T) (02T) 2-M2.5 x 0.45 Thread length 6 13 9 31.5 24.5 16.5 3 2.5 4 36 23.4 Mounting holes 9 6.5 6.5 47.5 10.5 Foot bracket 49.7 15.4 16.7 PE port P 1 3 R 1.5 A 1/8 NPTF R port 1/4 NPTF P port 23 Die cast hole For manifold gasket positioning L type plug connector (L): VQZ3 2(R)L -N7T, N9T, N11T, 02T DIN connector (Y): VQZ3 2(R)Y -N7T, N9T, N11T, 02T 88.5 300 (Lead wire length) Indicator

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F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: G, Port Size: 1/4, Connecting Tube Diameter: -, Pressure

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 100 or Less, Pipe Port Type: NPT, Port Size: 1/4, Connecting Tube Diameter: -,

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube Diameter:

Type of Actuation: 2 Position Single, Manifold Type: Body Ported, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: DIN Connector w/o Connector, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Body Ported 1/4, Base Mounted Sub-plate 1/4, Thread: G, Option: Side Bracket

Type of Actuation: 2 Position Single, Manifold Type: Body Ported, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: DIN Connector w/o Connector, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Body Ported 1/4, Base Mounted Sub-plate 1/4, Thread: Rc (or None), Option: Side Bracket

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: DO (DIN Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: N (NPT), Option: F2 (Side Bracket)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: DO (DIN Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: F (G), Option: F2 (Side Bracket)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: DO (DIN Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: C8 (Body Ported ø8 One-touch Fitting), Thread: Rc (or None), Option: F2 (Side Bracket)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: DO (DIN Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: Rc (or None), Option: F2 (Side Bracket

SX

Replacement Parts 3 5 7 SX 000-16-1A (With mounting screw) Bracket (For F1) No. i Description Part no. See How to Order Port Block Assembly on page 1-6-7. Port block assembly 3 5 7 SX 000-16-2A (With mounting screw) Bracket (For F2) 1-6-16 17 Body Ported Series SX3000/5000/7000 How to Change Port Block Assembly The cylinder port block assembly can easily be changed.

AC

AR1 (Exhaust air) PB (Supply air) ON state PA (Supply air) BR2 (Exhaust air) { Immediately after turning on F1> F2: See figure 3. Thereafter F1 = F2: See figure 2.

42

Page F1 NKE Corp.: Fieldbus System D side: EX123D-SUW1 U side: EX123U-SUW1 H NKE Corp.: Fieldbus H System D side: EX123D-SUH1 U side: EX123U-SUH1 * Stations are counted starting from the first station on the D side.

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-F1-AL6 V V V V ZP3EA-F2-AL6 V V ZP3EA-F3-AL12 V V V ZP3EA-F4-AL12 V V ZP3EA-F5-AL12 V V ZP3EA-F6-AL12 V w Holder r Pad Seal washer Form/Diameter Part no.

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Note 2) A grease pack (GR-R-010, 10 g) is included in seal kits. 10-14-12 13 Stainless Steel Cylinder Series CG5-S Dimensions R V Basic style (B): CG5BNS : With rubber bumper GA GB 2-Rc P H1 Width across flats B1 M BM (E1) D I I RE A B MM BZ B2 AL A K KA REC (F1) Plug bolt (4 pcs. included) C 0.1 8-J S + Stroke ZZ + Stroke H NA CX CY Bore size (mm) Stroke range A AL B1 B2 BM BZ C D E1 F1

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive