Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8)

Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector - Without Connector Cable), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8)

Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8)

Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector - Without Connector Cable), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8)

Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: E (Push-turn Locking Manual Override), Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8)

Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8)

Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector w/Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8)

Model: 42 (Dual AC Type), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 5L (ø3/16" Elbow)

HEC_W-E

25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Approx.2200W(water), 1500W(Fluorinert FC-77) Heating capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Recirculating fluid : Water, Fluorine solvent(GALDEN HT-135 Fluorinert FC-77, FC-3283) Recirculating fluid Reservoir capacity : Approx.5L

IP80-OM00019

./ 80L/min(ANR)(SUP=0.14MPa) *3 200L/min(ANR)(SUP=0.4MPa) 5L/min(ANR)(SUP=0.14MPa) *3 11L/min(ANR)(SUP=0.4MPa) 2080() 2060( ExdBT5) ExdBT5(TC15916) A A Rc1/4 1/4NPT G1/4 Rc1/8 A G1/2M20X1.51/2NPT G1/2 2.6kg 2.4kg JISF8007 IP65(IEC Pub.529) *11/21/2%F.S.

HRX-OM-R039

The tank level is within the specified range. 4.6 Adjustment of Circulating Fluid Flow adjustment If the flow rate is less than 5L/min it will not be able to achieve the specified cooling capacity.

MLGP

In order to hold the locked state, be sure to follow the steps below after confirming safety. 1) Remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to the unlocking port (2) shown below and unlock. 3) Screw the attached hexagon socket head cap bolt (3) (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), into the lock ring to hold the unlocked condition. 2.

CLQ

1) Remove the dust cover. 2) Supply air pressure of 0.2MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the unlocking bolt which is included (hexagon socket head cap screw/20, 25: M3 x 5l, 32: M3 x 10l) into the lock ring to hold the unlocked condition. Unlocking bolt Unlocking port Dust cover 2.

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

3 Port Solenoid Valve Series VQ100 1

VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Valve No. (1st to 4th stations) Blank plate part No. (5th station) VV3Q12-05 VQ110-5L VVQ100-10A-2 Applicable Solenoid Valve (Plug lead style) VQ1l0l-lL VQ1l0l-lM VQ1l0l-lG 1 VQ100 Series Place in front of the part No. of solenoid valve which is to be mounted. Manifold base 2 Plug lead unit Write sequentially from the 1st station on the D side.

o

N,,13 x 0-5 0.05 tM3 x o.5l lo.o5l M3 x 0.5 0.04(18) NVJA322.M3 N.O. NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.

FSQ seies

:l EgLr oA50, 54 6$ lu8f.2l 1tLJ Bore size ds2iRSf Qi:a 32lln D 1-05 5l!

o

N,,13 x 0-5 0.05 tM3 x o.5l lo.o5l M3 x 0.5 0.04(18) NVJA322.M3 N.O. NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.