Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Made to Order (Refer to page 735 for details.) 734 AS1F-D Series Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type How to Order AS 2 2 1 1 F 01 06 S D Body size Type adjustable by flat head screwdriver AS-F 1 2 3 4 M5 standard With seal 1/8, 1/4 standard 3/8 standard 1/2 standard Note) In the case that port size is either M5 or 10-32 UNF

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

Direct Solenoid

NPTF PO RTS) INCLUDES 1-Elock XT01&2 4-Soc Hd S..ews NxT02G10 11l4.2Ot2\ 2-Flush Plugs 3/8 " NPT Porl Felocalion Block DIMENSIONS DIMENSIONS A B c D E F G H 1.47 137) 1.36 (34.5) 0.87 4 (22.2:) 1 . 1 0 127.91 0.51 112.9) 0.43i1 (10.9) o.42 110.4 0.31 (7,9) Millimeters in Parentheses A B c D E F G H '1.75 144.4) 1.25 (31.7) 0.995 (25.3) 1 . 1 4 (28.9) 0.75 (19.1) (16.0) 0.47 0.19) 0.56 ('t4.21

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

Table of Contents

(Except L kit) F, P and S kits are provided with an exhaust on one side, while L kits are with an exhaust on both sides. Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Made to Order (Refer to page 681 for details.) 680 AS-FG Series Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type How to Order AS 2 1 0 3 F G 01 06 Body size Lock nut option Nil J Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Control type AS-F 0 1 Meter-out Meter-in Made to Order (Refer to the below for

Title not found

. diameter 99 o3 07 09 1 1 1 3 06 08 1 0 1 2 1 6 ;il H,r ,u x,N 1 2 m m Double universal male elbow 10 32 UNF Thread 1/16" NPT 1/8' NPT l+ trtpr H L' w' T' Y U' E Hex. socket head universalelbow 33 34 Extended Different dia. branch "Y" Double branch "Y" M5 M6 01 02 03 04 M5 x 0.8 N46 x 1.0 PT1/8 PI1/4 PT3/8 Pr1/2 a a a a a a a a a a a a a a a a a a a a a a r ) a a a a a a a a The use of compact

AR20-B to AR60-B

embedded type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B*1 C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5

•

'B c l D E Model M 'B C D E F G 1:4 1:6 Y 'A Y .' 1:6 H 1:8 H F G Flat with rib H H Flat Aatwith rib Flat ZPT25g ... ZPT20~ 20 23 I. 23 34.5 57.5 70.5 90.5 91 4 1.7 . 43 1 8.5 ) 32 44.5 ZPT40g 94.5 1 00.5 128 133.5 4() 6.5 3.3 ~ 53 19.5 1 33 45.5 25 28 I. 23 34.5 57.5 70.5 90.5 91 4 1.8 50 110.5 129 134.5 95.5 7.5 ZPT~ 3.8 . .

LEC-OM07605CN

46 D 62 E 47 E 63 F 48 F 64 4 9 4. 4.3.2 (1) 1.6 s 0.2 s (1 ) (2 ) b: Ready offOFF c: Ready onOFF d: Ready onON (2) ((2)((1)AL.32 0.8s 0.8s 0.2s (2 ) (1 ) (2 ) (1 ) n 4 10 4. 4.3.3 (1) ON ON (SSCNET/H ) (SSCNET/H) ON (SSCNET/H ) (SSCNET/H) () () : 1 [AL. 50 1] () :1 [AL.50 1] () Ready off OFF 0.8 s Ready on 0.8s 0.8 s () 0.8s () Ready on Off on :1 [AL.E1 1] : 1 [

F

16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

ZP

P. 82 P. 83 ZPB-X3 (J/JB/JF)01 68 Vacuum Equipment Precautions 1 Be sure to read this before handling.

LEC-OM02904

A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Modular Type Regulator Series AR

Symbol 20 25 30 40 50 60 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Name plate and pressure gauge in imperial units (PSI, F) When more than one specification is required, indicate in ascending alphanumeric order.

Series KP/KPQ/KPG

A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08

Series KP/KPQ/KPG

A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08

HEC-OM-S008

01 03 0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][

REC

24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5