42

(For F, L, S, T kit) VVQ4000 2A 1 Thread type Electrical entry VVQ4000 3A 1 Thread type Electrical entry Nil Rc N NPT T NPTF F G Nil Rc N NPT T NPTF F G L F , L, S, T kit F Note 1) F kit (Connector location on U side) C C kit (Plug lead type) L F, L, S, T kit F Note 1) F kit (Connector location on D side) C C kit (Plug lead type) SV SYJ Option Option Nil Standard W Note 2) IP65 enclosure

Series VQ Base Mounted Metal Seal/Rubber Seal

(Including the mounted valves. ) 1.10-148 Manifold optionsSV5Q11OP, #1 to #3 VQ 1000/2000 Plug-in Unit Base Mounted EXH block base assembly VVQ1000-19A-(C3, C4, C6, M5) F P L Manifold block ass'y Electrical entry F1 F2 F3 P1 P2 P3 L0 For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Made to Order (Refer to page 717 for details.) 716 AS-FM Series Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) How to Order AS 2 2 0 1 F M 01 06 Lock nut option Nil J Hexagon lock nut Round lock nut AS-F Body size TMH 1 2 M5 standard 1/8, 1/4 standard Made to Order Refer to the below for details.

HRX-OM-X084

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 2 Select function 17. Press the [] key. Displays screen for setting the function for the Contact output signal 2. Contact output signal 2 function DOUT2 SEL(Alternately displayed) Displays the function for the Contact output signal 2.

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

5 Port Solenoid Valve SY Series

-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8 x 1 15.1 (Lead wire length) 39.2 [46.2] Approx. 300 Pg7

7ND9071en

Lo (La) = 10 uH Co (Ca) = 10 nF 1 + 1 + 2 Ui (Vmax) 3.53 V Ii (Imax) 12.6 mA Pi (Pmax) 11.1 mW 2 3 CNT CNT 4 3 Limit Switches I02, I09, I57, I60 I45 I41, I58 D44 11 L 11 L 11 L (SOL1) L+ 12 13 L+ 12 NOTE 8 (SOL2) Ex i Barrier 13 L+ (SOL PWR1) (SOL PWR2) TOP SW+ TOP SW BTM SW+ BTM SW Ui (Vmax) Ii (Imax) Pi (Pmax) Li Ci L 14 L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii

Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Flow Control Equipment

Metric size 4 4 6 230 260 390 460 660 790 920 1580 1710 Controlled (Free)flow 180 Air flow (l/min(ANR)) Effective area (mm2) 2.7 3.5 4 6 7 10 12 14 24 26 Indication of air flow direction on body Note) Supply pressure: 0.5MPa, Temperature: 20C. How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

l h + l ZZ + l + 2 stroke With rod boot at both ends l l + Stroke h + l + Stroke S + Stroke h + l ZZ + 2 (l + Stroke) Stroke range (mm) Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 Bore size (mm) I J GA F AL C D E H1 S A B1 K KA MM NA P 15.5 19.5 19.5 27 32 32 37 37 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 26 31 38 47

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

HRX-OM-W002

R 1 1 [ ] R [ ] 14AWG BK 14AWG BK E CT 1 14AWG G/Y G1 [ ] CP (CN4) N N [ ] 14AWG BK 14AWG BK 2 2 22 21 L L L [ ] [ ] 14AWG BK 14AWG BK 1 1 12 11 BR 3 3 (CN2) WH BK BL 4 4 12 12 11 11 2 2 1/2 BR (CN1) 1 1 (CN7) 3 6 3 3 18AWG BK 1 18AWG BK 4 1 1 18AWG BK 18AWG BK 5 (CN5) 2 18AWG G/Y G5 [ ] 18AWG G/Y 3 2 1 Fig. 8-9 Electrical schematic diagram (Water-cooled type) HRR Series 8.5 Electrical schematic

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Made to Order (Refer to page 735 for details.) 734 AS1F-D Series Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type How to Order AS 2 2 1 1 F 01 06 S D Body size Type adjustable by flat head screwdriver AS-F 1 2 3 4 M5 standard With seal 1/8, 1/4 standard 3/8 standard 1/2 standard Note) In the case that port size is either M5 or 10-32 UNF

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

connector VZS VFS 20 (12, 14 port) 10.5 (2, 4 port) VS4 85.5 72.5 VQ7 10.5 PE port 29 14 SMC EVS M5-2 port 12, 14 port 1/8, 1/4-2 port 2, 4 port 1/8, 1/4-2 port 3, 5 port 21 21 VFN 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4

E-P HYREG

Pressure gauge (Option) G27-10-01 ITVX PVQ AN120-M5 Silencer (Option) VY1 VY1 VBA VBAT 1/8 gauge port AP100 Foot (Option) VEX1-18-2 Hexagon socket head cap screw M3 L = 8 (2 pcs.) (With spring washer) ( ) 1/8, 1/4 Port 2 (A) VEX1-18-1A Bracket (Option) Port 1 (P), 3 (R) 1/8, 1/4 Mounting hole 2 x 4.5 Hexagon socket head cap screw M3 L = 8 (2 pcs.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Made to Order (Refer to page 681 for details.) 680 AS-FG Series Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type How to Order AS 2 1 0 3 F G 01 06 Body size Lock nut option Nil J Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Control type AS-F 0 1 Meter-out Meter-in Made to Order (Refer to the below for

0.4

F kit P. 572 P kit P. 574 T kit P. 576 L kit P. 578 M kit P. 580 SOL.A 6 19 SOL.B Station 8 13 COM. to CYL port Connector terminal no. 554 Plug-in Unit VQC1000/2000 Series Base Mounted Model Response time Note 2) (ms) Weight (g) High-speed response: 0.95 W Symbol Flow rate characteristics Type of actuation Model 2-position single Series 1 4, 2 (P A, B) 4, 2 5, 3 (A, B R1, R2) Standard

JXCx-OMT0061CN

=012Ch F8 H 70 L 3 H= L= 39 - [] PLC RWr RWr bit 0 (L) 1 (H) 2 10.1.2 (1) [IN]( )[] (P.39) 3 4 READY 5 ALARM 0 6 7 8 ONOFF 9C () D E F 10.1.2 (1) [IN]( )[] (P.39) 1 F0 L 2 F0 H 3 70 L F8 H 4 70 L 1[%] F8 H 5 F0 L 0.01[mm] 6 F0 H 70 1 1 code 310 code 1 code 7 1234 code () F8 2 2 1 () 70 3 2 0 3 0 0 4 0 0 0 8 *code 16.2 (P.72) F8 4 9 15 F0 H= L= 40 - (2) [OUT

Table of Contents

(Except L kit) F, P and S kits are provided with an exhaust on one side, while L kits are with an exhaust on both sides. Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)