Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

0.4

VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152

Series VQ Base Mounted Metal Seal/Rubber Seal

sets of regulator unit With vacuum ejector unit B D G1 G2 G3 J K N R S (2) Series VQ1000 1 (3) Kit Manifold (3) (3) Plug-in unit 1 (4) Stations (5) Special wiring specification (Not double wiring) With name plate External pilot Built-in silencer (Direct exhaust) Cylinder ports 01 1 station Symbol Port size Symbol Port size C3 C4 C6 M5 CM L3 L4 (6) L6 L5 B3 B4 B6 B5 LM One-touch fitting

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(Station 1) Light/surge voltage suppressor 4 A 4 A 4 A 4 A 37.5 3/5 E 3/5 E 2 B 2 B 2 B 2 B 74.5 P 1 P 1 59.5 58.7 P 1 E 3 P 1 E 3 45.5 10 Individual EXH spacer Individual SUP spacer (For DIN rail mounting) (7.5) 11.8 L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1

VQZ1000/2000/3000

) 38 U side D side Stations 1 2 3 n (43) 2.5 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3 C4: One-touch fitting assembly for 4 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3 C4: One-touch fitting assembly for 4 C6: One-touch fitting assembly for 6 C6: One-touch fitting assembly for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) Dimensions Formula L1 = 11n + 20

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

V

1 3 Position/Exhaust Center 2 2 Position T H R E A D P O R T I N G Rc* Remove (N) when ordering N NPT F G* Remove (N) when ordering 02 1 4 (Body Size 2) 03 3 8 (Body Size 3) 04 1 2 (Body Size 4) 06 3 4 (Body Size 4) D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 200 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 300 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E

Table of Contents

4 n 1(P) SUP port 3(R) EXH port P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

SV

5 E 3/5 E 71 2 B 2 B 2 B 2 B (Station n) (Station 1) V 5 84.3 86.5 Light/Surge voltage suppressor P 1 1 P V 1 P 3 E Individual SUP spacer 59.6 63.5 MAX.21 145.6 Individual EXH spacer Interface regulator SV2000-M1Interface regulator SV2000-0052.5 12 (For DIN rail mounting) (7.5) B B B B 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 118 15 80 3 160.5 150 134 13.5 96

VQC

1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3(R) port 2-C12 3(R) port DIN rail clamp screw 76.5 60 49.5 35 30 25 10 (12) 13.5 25 C10 1(P) port (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 110.5 n: Stations (maximum 24 stations) n L L1 L2 L3 L4 2 89 142.5 162.5 173 3 105 158.5 187.5

SZ3000

center C4 C6 M5 M Nil N Positive common Negative common 1 2 3 4 5 Nil R Internal pilot External pilot 5 6 24VDC 12VDC When an external pilot valve is to be used, enter a symbol in section (b) of the station table below.

5 Port Solenoid Valve, Series VQC

1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3(R) port 2-C12 3(R) port DIN rail clamp screw 76.5 60 49.5 35 30 25 10 (12) 13.5 25 C10 1(P) port (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 110.5 n: Stations (maximum 24 stations) n L L1 L2 L3 L4 2 89 142.5 162.5 173 3 105 158.5 187.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

0.23mm2 1 P < >: AC R1 R2 5 3 82 M plug connector (M) 74.5 135.5 (3 Position) <137.5> 122.5 (Double) <124.5> 91.5 (Single) <92.5> 56.5 (Lead wire length) 58 <63> 300 1 P 61.5 <62.5> Cover diameter 1.5 Cross section 0.23mm2 R1 R2 5 3 73.5 1 P Indicator light R1 R2 < >: AC 5 3 Equation L1=16n+10 L2=16n+20 n: Station (Max. 20 stations) Dimensions 2 42 52 75 85.5 L n 3 58 68 87.5 98 20 330

Fieldbus System

One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 12 3 3 X 49.5 B B B B B B B B P X P12 30 25 1 A 1 A A A A A A A 13.5 10 (12) (7.5) 25 C10: 10 One-touch fitting C10 [1(P) SUP port] P = 16 45 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

Vacuum System Peripherals:

SX3 LOZ 40R Common specifications Rated voltage Manual override Type of actuation 2 positon single solenoid 2 positon double solenoid 3 position closed center 3 position exhaust center 3 position pressure center Positive common Negative common Nil Non-locking push type Push-locking slotted type 1 2 3 4 5 5 24 VDC 12 VDC Nil N D 6 Must be the same voltage as that of the manifold.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side 0.7 17 70 3 300 VT 43.5 10 (C4, C6) (M5) (Lead wire) VP Cover diameter 1.6 Cross section 0.34mm2 VG VP 48.5 (11) 7.5 R 3 1 P (18) 2-Rc

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2