Model A B C D E F 2 G H J K L M N P Q Vacuum inlet direction q Pad dia.
1 2 1 L L AF40-A AF20-A How to Order AF10-A AF A 30 q 03 e BD Option/Semi-standard: Select one each for a to f.
capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.
block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.
A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG
Through-hole/Both ends tapped (Standard): MK2TB MK2T-XC89 Lube-retainer Coil scraper 2 x P Cylinder port M A C G thread length H L N C A KA I KK 2 x J 4 x J K D 0.07 0.15 4 x F counterbore C S T AB AA MM KB Q R 2 x E through 2 x FF counterbore (mm) MM KB KK FF AB AA I N M L K J H G F E D C A KA Bore size 32 40 50 63 0.07 0.15 14 50 9 depth 11 9 depth 7 M10 x 1.5 8 4 46 45 34 6 M6 x 1.0 21
Note 2) Without a valve function. Note 3) For thread types M5 and NPT. Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.
2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !
L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q
(Fig. 4) Port Seal holder Rod seal A Retaining ring L is nearly equal to 100 mm or stroke by 1/2. Rod seal B Rod seal A L q t y r t w t e Bush shape thickness Fig. 1 Fig. 3 Grease application points 2-2. Piston seal Wipe off grease around piston seal first to make removal easier.
2 u r q !7 y Component Parts No.
formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.
Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)
w r e q w SQ2130 SQ2131 (A) (B) (A) (B) 2 4 2 4 5 1 3 5 1 3 (P)(R2) (R1) (P)(R2) (R1) Double (latching): SQ2230 Double (latching): SQ2231 t e q w t e q w SQ2230 SQ2231 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(R2)
Q[l/min(ANR)] = X X 60 X C X D2 X W 4 X 106 (P2 + 0.101) 0.101 Q[l/min(ANR)] = X X 60 X 1 = 841 X 1002 X 200 4 X 106 (0.8 + 0.101) 0.101 Refer to p.1.13-2 for flow rate characteristics table. Select booster regulator size from flow characteristic stable.
) CVM3 L 32 100 T 1 L Z Without auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches Piping MI W S 2 pcs. 1 pc. n pcs.
RHC L 50 100 1 D CV3K Without auto switch MK(2) L 50 100 1 Y7BW D CDV3K RS Q G With auto switch RS H A Number of auto switches Built-in magnet Bore size 40 50 63 2 pcs. 3 pcs. 1 pc. n pcs.
Q = (V x 60) /T1 + QL = (0.0031 x 60) /0.3 + 0 = 0.62 L From the formula on the front matter 17, the maximum suction flow rate Qmax is Qmax = (2 to 3) x Q = (2 to 3) x 0.62 = 1.24 to 1.86 L/min (ANR) According to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0.5 diameter can be used.
Unit Series AC10 to 60 Dimensions Pressure gauge port size AC10/20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) F.R.L.