High Vacuum Angle Valve A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG
4 !5 !7 !8 !9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !
4 !5 !7 !8 !9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !
RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LF LP LG LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2
RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LP LG LF LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2
L1 L2 H G F M Y E B 2 11.5 18.5 LQ1R1A-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 18.5 8 4 10 16 1/8" LQ1R4C-F LQ1R4B-F LQ1R4A-F LQ1R3D-F LQ1R3C-F LQ1R3B-F LQ1R3A-F LQ1R2F-F LQ1R2E-F LQ1R2D-F LQ1R2C-F LQ1R2B-F LQ1R2A-F 18.5 1/8" 19.5 4 16.5 28 14 12 6 15 21.5 1/4" 22 21.5 1/4" 24 5 23 36.5 17 18 9 20 25 3/8" 25.5 25
steel, PTFE 3 4 Class Stainless steel, NBR O-ring t y u t y u FKM, EPDM, PTFE FKM, EPDM, PTFE NBR O-ring NBR Return spring Stainless steel Return spring Stainless steel Body Stainless steel Brass Stainless steel Body Brass Dimensions: Bracket A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Port size
LVQ L1 L2 H G F M Y E B LQ 2 11.5 18.5 LQ1R1A-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 8 4 18.5 10 16 1/8" LQ1R4C-F LQ1R4B-F LQ1R4A-F LQ1R3D-F LQ1R3C-F LQ1R3B-F LQ1R3A-F LQ1R2F-F LQ1R2E-F LQ1R2D-F LQ1R2C-F LQ1R2B-F LQ1R2A-F LVN 18.5 1/8" 19.5 TI/ TIL 4 16.5 14 12 6 28 15 21.5 1/4" 22 PA 21.5 1/4" PAX 24 5 23 17 18
Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.
embedded type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B*1 C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5
Bore6:CO.5 ~ .+~ MM 4>1O, 1S:Cl n\ ~I +I." ~\ 10>1 f!-f.F F ", "I , H I' f.'5., I1tJ F E Rod end without ~ H S R thread , I Z oG H K l MM 1 s I z..q sst I lost IS" , 5" 16!J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .
C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11
Dimensions: Motor Top Mounting LEYG25, 32 Motor flange Y2 Motor Rod operating range Note 1) (Stroke + 4 mm) 4 x NA Section XX1 4 x OA through thread depth NB H M EV S Q U GA J Y (EB) EA M C EH T EB X 0.5 XA H9 depth XA EC ED B + Stroke Y1 L + Stroke 4 x OA thread depth OB XA H9 DB X Section XX1 (2:1) Bottom hole G through Note 2) depth XA 2 x NA thread depth NC (R2) XAH9 DA P XB (0.5) K Section
7 8 8.5 13 RS Q G 46 80 92 98 149 RS H A 5 RZQ 4.
Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin
9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !
S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5
Q Q Q MXP Series Q Q Q Product Features .pages 158-159 Q Q MXP Series Q How to Order .page 160 Q Specifications .page 161 Q Table Accuracy .page 162 Q How to Select .pages 163-164 Q Table Deflection .page 165 Q Construction/ Parts List, Seal Kits .page 166 Q Dimensional Drawings.pages 167-170 Q Auto Switch Specifications and Mounting.pages 171 Q Please see
247 M14 x 1.5 8 10 56.2 7 26.5 CE1 Rear flange style: RECG CE2 NN H2 2-RcP Width across flats B2 4-7 H1 G G Standard port Mounting hole ML2B Plugged (M5 x 0.8) Width across flats B1 I C J G5-S Eh8 D FY B CV AL MM MVGQ NA K A FX FZ N N F CC S + Stroke H FT In the case of 40 Z + Stroke RB ZZ + Stroke 2-7 Standard port Mounting hole J DB (mm) -X A AL B B1 B2 D F FT FX FY FZ G H E Bore (mm)