SYJ300/500/700

YO: Without connector Manual override Nil Non-locking push type D Push-turn locking slotted type E Push-turn locking lever type How to Order Pilot Valve Assembly DIN Terminal Part No. 5 Y V115 Without indicator light With indicator light SY100-82-1 Rated voltage Rated voltage Voltage symbol Part no. 24 VDC SY100-82-3-05 12 VDC SY100-82-3-06 100 VDC SY100-82-3-01 200 VDC SY100-82-3-02 110

3 Port Air Operated Valve Series SYJA300 1

55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 A B Base mounted: VPA744V(A port) Rc 3/8, 1/2 16 119.5 (PA port) Rc 1/8 16 80 67 (R port) Rc 3/8, 1/2 2(A) NO 53 66 PA 40 3(R) 1(P) NC 2-6.2 (Mounting hole) Switch mark 55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 5-5-20 9 Series VPA300/500/700 Manifold Specifications How to Order 1 04 41 02 3 VV3PA Thread type SA Nil Rc G

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area JIS symbol AS221FM-01 AS231FM-01 Models AS121FM AS131FM AS221FM-02 AS231FM-02 6, 8 3.2, 4 3.2, 4, 6 8, 10 4 6 Metric size 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" Tube O.D. 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 38 Flow rate l/min (ANR) Controlled flow 0.2 0.1 0.6 Effective area mm Flow direction symbols on body 230 180 100 460 260 390 Flow rate

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Flow Rate and Sonic Conductance AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 Model AS121FM AS131FM Symbol Metric size 6,8 8,10 1/8",5/32",3/16",1/4" 3/16",1/4" 5/16" Tubing O.D. 3.2,4 3.2,4,6 4 6 1/4",5/16" 3/8" Inch size 1/8",5/32" 5/32" 3/16" Air flow (L/min(ANR)) 12 38 7 Controlled flow Sonic conductance dm3/(sbar) 0.04 0.12 0.02 Flow Direction Symbols on Body Critical pressure ratio 0.25

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

Modular Design with Uniform Body Style

/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

0.01

(C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

fitting for 6 n-C6, C8, C10, 02 Grommet (G) 34 (7.5) (3) 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 U side 02: Rc(PT)1/4 n A 2 A 2 Manual override 5 4 (L4) 3 (L3) L2 L1 2 P=20 P=20 19.5 1 23 9 Station D side 50 29.5 75.5 300 3.8 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 64 62 11.5 R P 29.5 34 3 1 PE port 2-Rc(PT)3/8 P(SUP) port M5 X 0.8 External pilot port (Only

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

B 2 (EA)5 1 (P) 3(EB) M5: M5 x 0.8 3 position closed center 2(B) (A)4 Back pressure check valve 3 J: With switch A 4 Nil None (EA)5 1 (P) 3(EB) K Built-in 2 B 3 position exhaust center The built-in back pressure check valve type has an effective area approximately 20% smaller.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

0.4

Note 2) : Stations 02 to 24 Note 3) For S/P/F/L kits Replacement Parts No. Part no. Description Material Quantity VVQ1000-80A-1 VVQ1000-80A-2 VVQ1000-80A-3 VVQ1000-80A-4 o !0 !1 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

HEC-OM-S008

CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM

5 Port Solenoid Valve SY Series

Position closed center / Exhaust center / Pressure 3 4 5 G H 02 03 SY9 20Grommet (G), (H): SY9 20C8, N9 C10, N11 C12 G H 3 4 5 G: Approx. 300 H: Approx. 600 (Lead wire length) 73.9 [76.1] [4(A), 2(B) port) 3/8, 1/4 164.3 [168.7] 51.7 68.2 6.5 Manual override 4A 2B 18.4 (For manifold mounting) 33.2 Applicable tubing O.D. : 8, 5/16" : 10, 3/8" : 12 One-touch fitting [4 (A), 2 (B) port] 33.6