Stainless Steel 316 Fittings

Construction e q r q q Principal Parts Material Description No.

VM

POM Stainless steel Material Note y Description q Description Plunger Spring Valve Body T.T. = 2.5 mm only, w/threads w e u i Stainless steel Lever Packing O-ring NBR Valve Retainer Spring r POM o NBR t Stainless steel !

Air Cylinder Series CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

VZS

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

Fluoropolymer Piping Equipment

P0.01MPa 2 0 2 4 6 8 10 0 Number of needle rotations 939 B LVN Series Construction t r w e q With reducer i y u Part lists Material Description No.

AR Series Modular Type Regulator

-A AF 0.3 0.25 Outlet pressure (MPa) Set point 0.2 0.15 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 453 AR10-A to AR40-A Series Construction AR10-A AR20-A to 40-06-A t e t e q IN OUT IN OUT r r q w w Component Parts No.

Air Cylinder Series MB

5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body material: Aluminum q w e r t y u i IN IN o !0 OUT (Blow) !1 !2 Component Parts No.

Lubrication Equipment

Description Note AL1000/2000 AL3000/4000/4000-06 AL5000/6000 Zinc die cast Aluminum die cast Aluminum die cast Body Housing Painted silver Painted silver q !0 Replacement parts Material Part No. No.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

3 i y !2 Note) q w e r t i o !0!1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

y u u q w e r t q w e r t i i o o !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

0.4

Q DeviceNet Dust-protected: No part no.

0.4

2 i o q y !1 !5 !4 w !3 !0 r e u t 426 B Exploded View of Manifold Housing assembly and SI unit no. No. Manifold Part no.

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

Micro Mechanical Valve Series VM1000

3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Power Valve: Economy Valve Series VEX5

At that time, the lower poppet valve y fully opens.

30

17 18.6 20.8 M L Q A D N M O L Q A Note 1) D is maximum diameter.

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?