CLA MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!
10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 EHM19R10AY EH19R10GV 65 x L250 65 x L250 EHM15R10A EH15R10G EHM11R10A EH11R10G EHM10R10A EH10R10G EHM8R10A EH8R10G 65 x L125 65 x L125 Note) Specity seal material in place of "" (N for NBR or V for FKM).
10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 5 10 20 40 74 105 65 x L250 65 x L250 EHM19R10AY EH19R10GV 65 x L250 65 x L250 EHM15R10A EH15R10G EHM11R10A EH11R10G EHM10R10A EH10R10G EHM8R10A EH8R10G 65 x L125 65 x L125 Note) Specity seal material in place of "" (N for NBR or V for FKM).
Right and left sides are viewed from the front side of vacuum port (V). Maximum Ejector Stations ZM053 ZM054 ZM073 ZM074 ZM103 ZM104 ZM133 ZM134 ZM153 ZM154 Ejector model Manifold model R L 10 8 5 4 3 ZZM Stations 10 10 8 6 5 ZZM Stations B Effective area of external silencer is 160 mm2.
(V) indicator is Yellow/Green flashing Safe power supply (safety output) for the valve is not active Turn on the Safe power supply (safety output) 5 PWR(V) indicator is Red/Yellow flashing PWR is higher than the permissible level Check the power supply voltage level 6 Table 9-5 Troubleshooting for valve operation No.
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5
> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -
> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -
Note 5) Do not use the V-band type for gases. FGES/FGEL type (V-band type) FGET type (Bolt tightening type) Suitable for medium flow rate, low pressure filtration. Element replacement is easy with the V-band type.
) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)( ) 90 () (0100) ()90ON(OFF) () 10 L/min 10 L ON OFF ON ()OFF () 0 -12No.PF-OMP0001CN-F , ,2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,101112 1 L/min SI SI ON-OFF ON 0 ripple -13No.PF-OMP0001CN-F 4 0.50.7 Nm ,, M4(4) (67) M4 -14No.PF-OMP0001CN-F (
) ZS-33-JS () ZS-33-M () (3.02 ) ZS-33-MS () (3.03 ) ZS-33-R DIN 1 2 3 4 5 DIN F02(G/14)DIN -12No.PF-OMO0004CN-E (OUT) (IN) 1 2 2 INOUT DIN 1 2: LCD LED (UP) (SET) SET (DOWN) UP DOWN 3 ON/OFF (UP) 3 ON/OFF (DOWN) LED (OUT1)/ (SET) OUT1OUT2 OUT1ON OUT2ON 3 -13No.PF-OMO0004CN-E F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF ()
DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L
For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.
ARM ARM Fitting size 18.5 C4 C6 N3 N7 4 6 5/32 1/4 ARP 8.5 14 IR-A IR Straight type IRV VEX SRH V SRP SRF Elbow type ITV IC ITVH W X ITVX Y PVQ VY1 One-touch fittings for regulator VBA VBAT Fitting size Elbow Elbow Elbow Straight V W X Y AP100 4, 5/32 2.5 6 11 35.5 6 3 6.5 11 36 1/4 6.5 6 11.5 38.5 8, 5/16 Note) The O-ring is attached.
V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N o r m a l Fig. 6-3 Alarm indication in the event temp. upper and lower limit occurs LIGHT W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E Remote off Fig. 6-4 Alarm indication in the event Remote off occurs 6.2 Alarm indication 6-2 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.3 Content of Alarms Table 6-2 Content of alarm (1/2) Temp.
V a v e N.O Valve N.C V.llie [,1ial Grommet {DC voltage qrlll L tvDe D uo conneclar w th 300mm ead wr M lpe p ug term nal wlhout ead ',{'ire ""':"1""1 I T :***l I EE*-""1".1r*r"r*l Also Available S0700iS070 Manifolds Manifold C T 7mm width compact 3 and 5 port valves with low power consumption of 0.35W (0.1W with power saving circuit) ..\, ffi..
IC circuit 3-wire (PNP) 2-wire 12 V Diagnostic indication (2-color indicator) Water resistant (2-color indicator) 100 V 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Yes Grommet 24 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit M9PA1 M9PAV1 3-wire (PNP) 2-wire M9BA1 M9BAV1 12 V 5 V 12 V Relay, PLC Z76 Z732 A96 A93 A90 IC circuit 3-wire (NPN equivalent) Yes Grommet 24 V
3 Port Solenoid Valve Metal Seal/Bubber Seal 5 Port Solenoid Valve Metal SeauRubber Seal Base Mounted 0 t 4 N C V a v e Meial 0 3 3 0 3 9 N4ela 0 3 1 NC Va ve Base Mounted N O V a v e N C Valve lvleta 0 59 N O V a v e 3-port Base Mounted Valve conneclor with 300mrn lead wre M lpe plug teminalwithout lead wire Also Available 50700/5070 Manifolds Manifold 7mm width compacl 3 and 5 port valves
> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -