C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

C95

L3 d1 H9 MB1 Part no. d3 h KJ30D KJ35D KJ40D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 Refer to Page 6-16-1 for details on auto switches.

Profile Design ISO/VDMA Air Cylinder Series CP95

4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 18 20 11

CV/MVGQ

41 50.5 42.5 85 41 93 49 42 48 42 85.5 91 93.5 CE2 80 107 49.5 48.5 59 51 93.5 48.5 101.5 55.5 50 54 50 94 107 102 100 ML2B 104 121 58.5 56 69.5 59 56 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

63 103 154 3.5 Model ZPX63HJ25-01-A18 ZPX63HJ50-01-A18 ZPX63HJ75-01-A18 ZPX80HJ25-01-A18 ZPX80HJ50-01-A18 ZPX80HJ75-01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-01-A18 52 171 222 80 82 16.5 28 43

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Single Non plug-in type (with terminal) .Remove cover 0 over terminal block 41 attached to the inside of body. Connect with corresponding power supply.

Air Pilot Operated

NVSA 41 1 4-'l 1 N b a NVSA 41 1 4-0ON vatle mount , on a #11 block. 't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7." NPT side & bottom pons (4) '16 = Mounted on stacking moLlnted block 7." NPT side (2) & bottom (5) ports To Order "Faclory Built" Valve/t anifotd Assmbty: EXAITPLE 1 Pce.

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D

Air Pilot Operated Series NVSA

NVSA 41 1 4-'l 1 N b a NVSA 41 1 4-0ON vatle mount , on a #11 block. 't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7." NPT side & bottom pons (4) '16 = Mounted on stacking moLlnted block 7." NPT side (2) & bottom (5) ports To Order "Faclory Built" Valve/t anifotd Assmbty: EXAITPLE 1 Pce.

Brake mechanism added

41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

(Refer to page 121.)

smcmaintenancepartslist

Contents Bore size (mm) 40 50 63 80 100 MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS #9 $0 41 Piston seal NBR Rod seal A NBR Set of left nos. #9, $0, $3, $5 Rod seal B NBR 42 $3 44 $5 46 Release piston seal NBR 41, 42, 44 and 46 to 49 are non-replaceable parts, so they are not included in the seal kit.

MXS Series Air Slide Table

19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125 MXS20-150 169 223 275 62 Air Slide Table MXS Series Dimensions MXS 20 With shock absorber (20) MXS20BS, BT, B 47.5 34

3 Port Solenoid Valve Series SYJ300/500/700

M5 x 0.8 Type 41 Applicable solenoid valve SYJ314SYJ314MSYJ324SYJ324MHow to Order SS3YJ3-41-05 --M3 Type 41 Type S41 Pilot valve is on the A port side. ( ) Valve mounting direction Stations 02 2 stations Pilot valve is opposite the A port side. Applicable blanking plate assembly SYJ300-10-2A Nil R port M5 x 0.8 : : A A R port 20 20 stations Pilot valve is on the A port side.

Basic Type/Direct Mount Type

42 48 Y 39.5 54.5 64 72 79 93 113 121 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25 40 40 50 60 60 70 Z 76 94 107 117 130 148 176 188 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 WS 8 7 7 7 7 7 10 10 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 QW 14 18 17 20 26 34 48 60 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50

XM, XY

Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 491 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal XMH, XYH Series RoHS How to Order XMH XYH 16 25 Angle type In-line type q w e w Flange type XMH q Flange size XMH XYH Symbol Nil C Applicable flange size 16, 25, 40, 50

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

) 40.7 (181) 54.2 (241) 67.9 (302) 81.4 (362) 94.9 (422) C(L)KQG32 13.5 to 20.0 27.2 (121) 40.7 (181) 54.2 (241) 67.9 (302) 81.4 (362) 94.9 (422) 108.6 (483) 122.1 (543) 135.6 (603) Note 1) It takes approximately 0.3 seconds for the cylinder to operate to generate clamping force from an unclamping state (when no speed controller is installed).

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

Air Slide Table Series MXW

Width across flats 13 Operating port Rc 1/8 (NPT 1/8, G 1/8) 8 x M5 x 0.8 thread depth 13 Note) A Operating direction 6H9 + 0.030 0 depth 5.5 (Insert) 7 (Hexagon socket head taper thread plug) 48 98 72 41 10 8 25 40 40 40 Y Y Operating port Rc 1/8 (NPT 1/8, G 1/8) 41 160 B Operating direction 6H9 + 0.030 0 depth 5.5 (Hexagon socket head taper thread plug) 10.5 Operating direction B A 9.5