HRX-OM-X084

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

HRX-OM-W002

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

HRX-OM-X071

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

REA/REB

Contents Data REAS10-PS 10 Set of nos. above @6, @7, @8, @9, #0, #1, #2 REAS15-PS 15 10-2-31 31 Series REAS Construction: 20 to 40 @9 !5 @1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !1 @2 @5 @7 @6 @3 N@4 @0 !0 !2 rt ew u y !3!4 i o q !7 !6 !9 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 8-29-10. 8-29-31

MNB

38 23 30 23 26.5 23 25.5 27.5 77 27.5 67 32.5 25 35 24.5 32 CNS 33 42 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 36.5 27.5 38.5 27.5 40 39 46.5 31 38 31 34.5 31 33.5 87 77 41 34 43.5 34.5 50 CLS 44 51.5 36 43 36 40 36 39 93.5 83.5 46 39 48.5 39.5 63 51.5 58 45 52 45 48.5 45 47.5 103 92.5 52.5 46.5 55 46.5 80 CLQ 60.5 65.5 53.5 60 53.5 56.5 53.5 55.5 113.5 103 59.5 55 62 55 100 MLGP

MNB

38 23 30 23 26.5 23 25.5 27.5 77 27.5 67 32.5 25 35 24.5 32 CNS 33 42 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 36.5 27.5 38.5 27.5 40 39 46.5 31 38 31 34.5 31 33.5 87 77 41 34 43.5 34.5 50 CLS 44 51.5 36 43 36 40 36 39 93.5 83.5 46 39 48.5 39.5 63 51.5 58 45 52 45 48.5 45 47.5 103 92.5 52.5 46.5 55 46.5 80 CLQ 60.5 65.5 53.5 60 53.5 56.5 53.5 55.5 113.5 103 59.5 55 62 55 100 MLGP

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Manifoltl: Side Ported./ NVV5J3-31{g!!

REA/REB

Contents Data REAS10-PS 10 Set of nos. above @6, @7, @8, @9, #0, #1, #2 REAS15-PS 15 10-2-31 31 Series REAS Construction: 20 to 40 @9 !5 @1 !1 @2 @5 @7 @6 @3 N@4 @0 !0 !2 rt ew u y !3!4 i o q !7 !6 !9 !8 @8 #2 #0 #1 #3 #4 Component Parts Material No. Description No. Description Note Material Note Stainless steel Nickel plated Carbon steel Lock nut B Cylinder tube q !

o

Manifoltl: Side Ported./ NVV5J3-31{g!!

o

Manifoltl: Side Ported./ NVV5J3-31{g!!

1.63

MGP (mm) MGPW MGPW Bore size (mm) GC PA PB MGQ 20 25 32 40 50 63 9.9 23.5 10.5 10.3 25 13.5 MGG 11.4 31 16 13.5 31 18 MGC 14 35 21.5 15.5 36 28 MGF MGZ MGT PB PA GC D-X 517 MGPW Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 12 for Actuator and Auto Switch Precautions.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

C95Series

IN 46226 October 1996 Tel: (317) 899-4440 ' FAX: (31 7) 899-3102

Environment

22 18.5 40 M6 x 1.0 101 to 500 178.5 160 LEC Y Size Stroke range [mm] R OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA

Modular F.R.L. Unit

Optional specification Note 2) With barb fitting B With drain guide B Metal bowl B 85 123 166 166 200 200 276 292 293 Metal bowl with level gauge Model B AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 161 161 195 195 272 287 288 160 160 194 194 271 286 287 186 186 220 220 296 312 313 4 F.R.L.

AC Servo Motor Driver (CC-Link Type)

(When the point table occupies 1 station, a maximum of 31 points are usable. 255 points become usable when 2 stations are occupied.)

High Vacuum Angle Valve

C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31

PF-OMM0004_C

WIN PLS ACCUMU HYS 2. 1_P/1_N(29 ) Add/dEC (31 ) 3. P1L/n1L P1H/n1H H1 (30 ) P1AH/n1AH P1AL/n1AL P1dH/n1dH P1dL/n1dL P_1/n_1 H_1 (30 ) (31 ) 4. SoG/SoR/REd/GRN(33 ) 5. [F 1] OUT1 -28No.PF-OMM0004-D 1. [F 1] [oUt1] 2. ON-OFF -29No.PF-OMM0004-D 3. a. ([n_1]) (33 ) b.