Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

-23ST AS121F-U10/32-07T 13.5 12 18.3 23.1 1/4" 3.2 8.4 20 12.7 20 AS221F-01-04ST AS221F-N01-01ST 1/8" 8.4 20.4 27.5 4 9.3 12.7 5/32" 9.3 20.4 27.5 13.4 21 AS221F-01-06ST AS221F-N01-03ST 34.7 R1/8 12 14.2 7 1.5 31.6 13.5 6 11.6 21 13.4 34.7 AS221F-01-08ST AS221F-N01-05ST 16.5 NPT1/8 12.7 14.2 7 1.5 31.6 3/16" 13.2 24 31.1 18.5 25.3 32.4 8 15.2 23 23 AS221F-01-10ST AS221F-N01-07ST 15.3 17 1

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread 10 83 49 23 Width across flats 12 20 121 59 51 30 131 69 40 167 79 77 50 177 89 10 13 38 22 D C B 2.5 6 M10 x 1 14 3 10 83.5 49.5 23 20 121.5 59.5 51 30 131.5 69.5 40 167.5 79.5 77 50 177.5 89.5 Width across flats 7 16 38.5 22.5 N4 N6 U4 U6 A10 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 E2

Air Slide Table

30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height

MGP

20 30 40 50 51 100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight

Electric Actuators

C 30 D Refer to page 300 for mounting.

MGP

pressure (MPa) Bore size (mm) Piston area (mm2) Operating direction 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGP 113 102 90 79 68 57 45 34 23 113 OUT 6 12 85 77 68 60 51 43 34 26 17 85 IN MGQ 201 181 161 141 121 101 80 60 40 201 OUT 8 16 151 136 121 106 91 76 60 45 30 151 IN MGG 314 283 251 220 188 157 126 94 63 314 OUT 10 20 MGC 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246

Table of Contents

C 30 D Refer to page 300 for mounting.

Made to Order

MGC series 20 to 50 MGC Series (mm) C port SZ + Stroke B Cushion valve (Width across flats WH) Front mounting flange Bore size (mm) GC GD SA SB W 1 W 2 A, B port A port W 2 W 1 A 20 25 32 40 50 30 30 21 9 50 87 30 30 C port D port 21 9 50 87 B port W 2 W 1 10 A' 25 30 23 9 52 91 20 20 24 8 59 99 Cushion valve (Width across flats WH) D port ZZ + Stroke A + Stroke B SB + Stroke B SA + Stroke

LX

C 30 D Refer to page 300 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

MG

101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulator) 2.35 mm Min. bending radius (Fixed) 110 mm Power Supply Cable/Gateway Decentralized System (64 Points) For DeviceNet For PROFIBUS DP @6@7EX500-AP 050 S Connector specification Cable length (L) Angle connector type 010 1000 mm 050 5000 mm S Straight A Angle M12 14.9 Straight connector type 14.9 1 M12 6 6 5 1 2 2 28.3 5 4 3 4 3 30 5 50 L 25.3 30 5 50 40.7 27 Socket connector

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt Model C Mounting bolt CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 76 46 73 58 FF 22.5 5H9 ( ) depth 5 +0.030 0 F 25 +0.030 0 5H9 ( ) depth 5 N 1 x F 2 51 2 x M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 ( ) depth 5 +0.030 0 30 1.5 NN x M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 ( ) depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M

SMC

-Rc, G, NPT1/8 13 3 2M6 x 1 thread depth 6.5 5H9 depth 5 +0.030 0 5H9 depth 5 +0.030 0 HA GA NN-M6 x 1 thread depth 12 6 B A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

CXS

, 35, 40, 45, 50 60, 70, 75, 80, 90, 100 30 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 20 15 100 10 25 30 35 40 45 50 60 70 75 80 90 Model CXS20 194 104 109 114 119 124 129 134 139 144 154 164 169 174 184 60 40 90 85 170 80 95 100 105 110 115 120 130 140 145 150 160 196 106 111 116 121 126 131 136 141 146 156 166 171 176 186 60 40 30 92 87 172 82 97 102 107 112 117 122 132 142 147 152

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use