V

(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8

7

5 C 6 D ( ): Denotes the Normally Open (N.O.) dimensions. 144 Pilot Operated 2 Port Solenoid Valve VXD Series Air Air Oil Water Dimensions/VXD2 /2 Body Material: C37, Stainless Steel 5 C 6 D Conduit terminal (U2) (V2) E 34 C VX2 32 25 T VXK VXD VXD G1/2 M A VXZ OUT IN VXS B VXB L K F I 2 x P Port size VXE (D) J VXP E U 280 C Conduit VXR 23 T VXH G1/2 VXF A B VX3 IN OUT M VXA 2 x P Port size

Series VQ Metal Seal/Rubber Seal Body Ported

position single Note) See Options" on p.1.10-67 for inch size One-touch fittings. 1 2 3 4 5 6 100V AC (50/60Hz) G: Grommet C kit single only.

Title not found

Connector C Actuator side (Terminal no.) 1 2 5 6 (14) (18) 8 A1 B1 (13.5) (17.7) (17.7) Cable length (L) 1 3 5 8 A B C 1 2 A6 B6 1.5 m 3 m 5 m 8 m (30.7) Connector A 5 6 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 m (14.2) Connector C (Terminal no.) 1 2 5 6 15 m 5.5 6.3 Actuator side (14) (18) (Terminal

VFR

Air release valve Air release valve 1 station 1 station Control unit Control unit 1 station 1 station Pressure switch Pressure switch Connector terminal no. 2 station 2 station 2 stations 2 stations 3 stations 3 stations 3 stations 3 stations 4 stations 4 stations 4 stations 4 stations 5 stations 5 stations 5 stations 5 stations 6 stations 6 stations 6 stations 6 stations Connector terminal

NCA1

1/8 5/16 3 1/4 1 1/2 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 1 1/2 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 1 1/2 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 1 3/4 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE TD TL TM UM UW 1 1/2 1 1 2 1/2 4 1/2 2 1/2 2 1 1 3 5 3 2 1/2 1 1 3 1/2 5 1/2 3 1/2 3 1/4 1 1 4 1/2 6 1/2 4 1/2 4 1 1 5 1/4 7 1/4 5 1/4 5 1 1 6 1/4 8 1/4 6 1/4 6 1 3/8 1 3/8 7 5/8 10 3/8 7 5/8 11 Dimensional Drawings Expanded

Air Cylinder NCA1 Series

1/8 5/16 3 1/4 1 1/2 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 1 1/2 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 1 1/2 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 1 3/4 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE TD TL TM UM UW 1 1/2 1 1 2 1/2 4 1/2 2 1/2 2 1 1 3 5 3 2 1/2 1 1 3 1/2 5 1/2 3 1/2 3 1/4 1 1 4 1/2 6 1/2 4 1/2 4 1 1 5 1/4 7 1/4 5 1/4 5 1 1 6 1/4 8 1/4 6 1/4 6 1 3/8 1 3/8 7 5/8 10 3/8 7 5/8 11 Dimensional Drawings Expanded

Cylinder with Lock

4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 10 D-A5m D-A6m n 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 10 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 20 15 D-A59W n 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 25 20 D-F5NTL n 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6,

Table of Contents

2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !

ARM10/11

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

ARM10/11

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

CQS

2 2 (4.5) 0 0 19 6 4 6 6 4 21 Bore size (mm) 20 6 6 1.5 (1) 3.5 3.5 22.5 10 7.5 2.5 10 7.5 24.5 25 7 7 3.5 (1) 5.5 5.5 24.5 11 9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

VQZ1000/2000/3000

22 22 Series VQZ1000/2000/3000 Dimensions: VQZ3000 (35) VV5QZ32Stations C Grommet (G) 2n-C6, C8, C10, 02 35.5 (12) (5.5) C8: One-touch fitting for 8 C6: One-touch fitting 6 (7.5) 26 (4) 44.5 mounting hole C10: One-touch fitting for 10 02: Rc 1/4 DIN rail clamp screw n Manual override 5 A 2 4 SMC SMC SMC B 4 A (L4) (L3) 2 L2 L1 3 SMC B 4 A 2 2 SMC SMC P = 19 B 4 A 2 1 SMC SMC B 21 4 6 Stations

MGP

6 XAH7 depth 6 GA PB Q 2-P (plug) PA + Stroke GB J K S FB FA C + Stroke B + Stroke E A + Stroke G Note 1) Refer to "Manufacture of Intermediate Strokes" on page 19 for intermediate strokes.

REA/REB

6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

SYJ3000/5000/7000

M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74

Rotary Actuator/Vane Type

D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series

Refrigerated Air Dryers

[C] Correction factor 2 to 25 1.14 30 1.04 32 1 35 0.96 40 0.9 Ambient temp. [C] Correction factor 2 to 25 1.06 30 1.02 32 1 35 0.99 40 0.98 45 0.92 Ambient temp. [C] Correction factor 2 to 25 1.10 30 1.05 32 1 35 0.95 40 0.90 Ambient temp. [C] Correction factor 2 to 25 1.2 30 1.04 32 1 35 0.93 40 0.84 Ambient temp.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

MG

2 !3 !4 !5 !6 !7 !8 !