Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 02 (Base Mounted w/Sub-plate 1/4 Side Piping)
Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 02 (Base Mounted w/Sub-plate 1/4 Side Piping), Thread: T (NPTF)
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Function: 4 (3 Position Exhaust Center), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 03 (Sub-plate Plug-in 1/8, Non Plug-in 3/8, Direct Ported P,A,B Ports 3), Thread: T (NPTF
Function: 1 (2 Position Single), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1/2, Non Plug-in Standard 1/2), Thread
Function: 3 (3 Position Closed Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 03 (Sub-plate Plug-in Terminal 3/8, Non-plug-in Standard 3/
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: Base Mounted w/Sub-plate 1/4 Side Piping, Thread: -
Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Base Mounted w/Sub-plate 1/4, Body Ported 1/4, Thread: NPTF, Option: -
Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Base Mounted w/Sub-plate 1/4, Body Ported 1/4, Thread: NPTF, Option: -
Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: Sub-plate Plug-in Terminal 3/8, Non-plug-in Standard 3/8, Thread: NPTF
Function: 2 Position Single, Body Option: Base Mounted Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: Sub-plate Plug-in Terminal 1/2, Non Plug-in Standard 1/2, Thread: NPTF
Series: SY7000, Port Size: SY7000 3/8 inch, SY9000 1/2 inch, Thread Type: G
Series: SY9000, Port Size: SY7000 3/8 inch, SY9000 1/2 inch, Thread Type: G
Function: 3 Position Exhaust Center, Body Style: Base Mounted Plug-in, Body Option: Standard for Base Mounted Type, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Sub-plate Plug-in 1/8, Non Plug-in 3/8, Direct Ported P,A,B Ports 3, Option: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -