Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.

Valve Type: In-line Type, Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.

Valve Type: Angle Type, 2 Stage Control, Single Acting, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.

tapped, Port thread type: NPT, Auto Switches: M9NA, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

(standard), Port thread type: NPT, Auto Switches: M9NA, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

15

LEF LEJ Component Parts LEL Quantity Size 25, 32 63 1 Motor flange 1 1 No.

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1

Environment

201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move when it returns to origin.

XM, XY

XMD-25-M9NA-XN1A The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi Cable Industries, Ltd. 488 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Specifications XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 XMD-25 XYD-25 Model Flange (Valve) size 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMD-25-M9NA-XN1A The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi Cable Industries, Ltd. 7 Series XMD, XYD Specifications XMD-25 XYD-25 XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 Model Flange (valve) size 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) [both main & initial exhaust valves] Fluid Inactive

ISO Cylinder

air cushion is 25 mm.

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

to 500 25 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 25 to 600 25 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 7 18 80 63 32 to 600 32 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 7 18 99 80 41 to 750 41 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 10 22 117

XLAQ/XLDQ

CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. Barrel Perfluoro is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Weights (g) Bore size (mm) 10 16 Basic 22 46 Axial piping 22 46 Double clevis (including clevis pin) 24 54 Head-side bossed 23 48 Additional weight per 15 mm of stroke 4 7 Basic weight (When the stroke is zero) Single foot 8 25 Double foot 16 50 Rod flange 5 13 Head flange 5 13 Mounting bracket weight Single knuckle joint 17 23 Double knuckle joint (including knuckle pin) 25 21 Rod end cap

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

Parallel Style Air Gripper/2-Finger Type Series MHS2 16, 20, 25, 32, 40, 50, 63 How to Order Bore size 16 to 25 M9BW 20 MHS2 D 2 fingers Number of fingers 2 Number of auto switches Nil S 2 pcs. 1 pc. Auto switch Bore size 16 20 25 Nil Without auto switch (Built-in magnet) 16 mm 20 mm 25 mm Made to Order Refer to page 545 for details.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Cylinder Speed Checker

Grommet (Perpendicular) M9NWV Water resistant Grommet (In-line) M9NA M12 Grommet (Perpendicular) M9NAV M12 Please contact SMC for other applicable auto switches. Note that although it can be connected, the IP65/67 may not be held depending on the assembly method. The lead wire is converted to M8/M12 connector for use.