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Part Number Description: HIGH VACUUM VALVE ELECTROMAG   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 687   Family Description: XLS HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE ELECTROMAG   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 687   Family Description: XLS HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 687   Family Description: XLS HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

When the ambient temperature is 20C 5C and rated voltage is applied. Changing coils from AC to DC and vice versa is impossible, because of different core shapes.

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

1.41 0.41 1.07 0.46 1.32 0.52 1.33 0.51 1.71 0.28 0.82 0.34 1.07 0.23 0.81 0.19 0.49 335 LLB Series Specifications Model LLB3 LLB4 Clean Air Module Common Specifications Fluid Clean air, N2 gas (Inlet air conditions: equivalent to ISO 8573-1 and Quality Class 1.4.1-1.6.1) Note 3) Maximum operating pressure 0.7 MPa Set pressure 0.05 to 0.4 MPa Withstand pressure 1.0 MPa Fluid temperature 5C

./0.05 MPa Ambient and fluid temperature 5C to 60C Port size Rc1/4 (Gauge port Rc1/8) Weight Approx. 700 g (at 100 mm stroke) Construction/Principle of Operation When signal pressure enters input chamber q, the input diaphragm e is deflected left. Clearance of the nozzle y is reduced causing higher back pressure at diaphragm A u.

Use in low temperature environments The valve can be used at a temperature down to 5C. Take appropriate measures to avoid freezing of drainage, moisture, etc. 2. Operation method The valve must be switched to each position instantly and securely. Stopping the handle halfway between the extreme positions may cause malfunction. VHS 5-8-15

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5C (Tube O.D. 3/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5C (Tube O.D. 3/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: R, Rc, Packaging: 1 (Standard Packaging Equivalent to Class M5.5

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5C (Tube O.D. 3/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5C (Tube O.D. 3/4", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)