15

42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5 NY M3 x 0.5 5.5 45 30 5 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 7.5 NX M4 x 0.7 7 46 30 3.7 11 42 M2.5 x 10 1.0 M3 x 8 0.63 8 4.5 NM2 3.4 7 31 30 3.7 8.5 42 M2.5 x 10 1.0 M3 x 8 0.63 6 4.8 25 NZ M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 14 4.5 NY M4 x 0.7 7 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NW M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 2.5 M4

Speed Controller with Indicator

AS301FS, AS311FS AS401FS, AS411FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

M14 x 1.5 27 1/4 42 11 20 45 153 51 255 52 43 15 59 1/4 stroke 263 271 50 11 M8 x 1.25 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 284 58 52 15 66 1/4 stroke 292 300 63 11 M10 x 1.25 7 18 99 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 58 298 58 52 17.5 66 1/4 stroke 306 314 80 13 M12 x 1.75 10 22 117 17 M22 x 1.5 37 1/2 55 15 23 70 208 71 350 80 65 21.5 80 1/4 stroke 359 368 100 16 M12 x 1.75

Electric Actuators

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

MNB

15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 4.5 4.5 4.5 4 4 3.5 Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.

MNB

15 11 9.5 11 14 11 9.5 11 14 11 7.5 10 13 10 8.5 9 13 9 ML1C D-A5/A6 9 D-A59W 13 9 DD-A3/A44 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 5.5 6.5 7.5 7 5.5 5.5 -X D-Y7BAL 5 4.5 4 3.5 3.5 3.5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 4.5 4.5 4.5 4 4 3.5 Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.

MXQ

40.8 6 12 1.4 20.5 11 13 18.5 MXQ16(L) M5 x 16 M10 x 1 MXQ-BS16(L) M5 x 16 22 11 36 17 13.5 46.7 7 14 1.4 23 13.5 16 21 MXQ20(L) M6 x 20 M14 x 1.5 MXQ-BS20(L) M6 x 18 35 13 46 22 17.5 67.3 11 19 12 27 17 22 25 MXQ25(L) M8 x 20 M14 x 1.5 MXQ-BS25(L) M8 x 18 35 16 54 22 18 67.3 12 19 12 33 19 22 31 1) Size of hexagon socket head cap screw 2) It is also available in the symmetric type.

Table of Contents

9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

CNA

18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

CNA

18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.

Modular F.R.L. Units

13 13 13 13 13 1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Table of Contents

(Refer to page 14-19-11.)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P = 10.5 Approx. 300 (Lead wire length) 12.5 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8[51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P = 10.5 12.5 4.5 41.5[48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5[48.5] (Pitch) P = 10.5 13.5 M3 x 0.5 (A port) A A 13 10 (Pitch) P = 10.5 11.5 M3 x 0.5

7ND9071en

L 11 L 11 L (SOL1) L+ 12 13 L+ 12 NOTE 8 (SOL2) Ex i Barrier 13 L+ (SOL PWR1) (SOL PWR2) TOP SW+ TOP SW BTM SW+ BTM SW Ui (Vmax) Ii (Imax) Pi (Pmax) Li Ci L 14 L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

CRB2/CRBU2/CRB1

Note) These items (No. 11, 13, and 14) consist of auto switch unit and angle adjuster. Refer to pages 84 and 85 for detailed specifications.

CY1

6.5 3.2 12 4 27 25.5 26 24 14 25 24 5 M4 x 0.7 x 6 9 6.5 CY1RG15 2 0.5 8 4.2 17 5 33 31.5 32 30 17 31 30 8.5 M5 x 0.8 x 7 14 8 CY1RG20 3 1 9.5 5.2 22.8 6 39 37.5 39 36 21 38 11 36 7.5 28 M6 x 1x 8 11 9 CY1RG25 3 1 9.5 5.2 27.8 6 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 M6 x 1 x 8 15 8.5 CY1RG32 3 1.5 11 6.5 35 7 55 53.5 55 52 29 54 20 51 7 41 M8 x 1.25 x 10 13 10.5 CY1RG40 5 2 11 6.5 43

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

11 7.5 8 45 50 19 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 16 22 M16 x 1.5 30 26 3/8 5 43 112 11 10 9 50 63 21 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 16 25 M18 x 1.5 30 26 3/8 5 47 116 11 12 10 55 80 26 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 19 29 M22 x 1.5 35 30 1/2 5 57 127 11 16 13 65 100 34 38 6.5 118 90 35.5 35 27 19 16 M12 x 1.75 27 21 34 M27 x 2 35 32 1/2 8 66 137 12 20 16 80 125