5-Port Solenoid Valve

42.5 18 (Fitting for the type with P/E ports on the U and/or D sides) (Lead wire length) 0.6 m, 1.5 m, 3 m (L4) (DIN rail mounting hole pitch: 12.5) (5.3) (L3) One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" : 6, 1/4" : 8, 5/16" (Station n) (Station 1)-One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10, 3/8" 14.1 1 P 1 P 73.2 2 B 2 B 2 B 2 B 2 B 56.6 8.7

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

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Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis of

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

Metal Seal/Rubber Seal Series VQ Body Ported

(M plug connector) 127 (L plug connector) P P A A A A A A A A 93.5 (M plug connector) 99.5 (L plug connector) 35.5 32 B B B B B B B B R R 24.5 20 65 11 1(P) SUP port 2-C6 2n-C3, C4, C6, M5 7 7.5 C3: One-touch fitting for 3.2 P = 11 19.2 2-C6 C4: One-touch fittings for 4 3(R) EXH port C6: One-touch fitting for 6 M5: M5 thread 3 position 50.5 n: Stations (Maximum 16 stations) Formula L1 =

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 87.2 [91.6] 43 3.5 11 5 B A B A Manual override 19 10 10.6 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D. : 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2 x 2.6 (For mounting) 3 11 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector (M): 10-SYJ5223

ZP

B4 M4 x 0.7 B5 M5 x 0.8 N4 For 4 nylon tubing M-5AN-4 N6 For 6 nylon tubing M-5AN-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 C Width across flats 10 Model 29 A2 B C Vacuum inlet direction q Pad dia.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

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(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Base Mounted Metal Seal/Rubber Seal Series VQ

L plug connector) 45 (M plug connector) 13.5 9.9 5.5 9 (4(A), 2(B) port) SMC 5 8.7 8.7 M5: M5 thread C4: One-touch fitting for 4 3-C4, M5(1(P), 4(A), 2(B) port) 60 M5 (5(R1) , 3(R2) port) < >: AC 3 position exhaust center: VQ0 5 3 4 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B EB P EA EB P EA 23.4 mounting holes 38 31 Lead wire length = 300 131<141> M plug

SYJ3000/5000/7000

28.1 [35.1] 12.7 2-2.6 (For mounting) Built-in One-touch fitting: SYJ5120(-F) G H C4, N3 C6, N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(For mounting) 2 x 3.2 35 3 Manual override 3 22 A B + + B A PE X P EB EA 42.7 10.2 32.4 [34.6] 97.3 [101.7] G: Approx. 300 H: Approx. 600 M5 x 0.8 (External pilot port) M5 x 0.8 (Pilot EXH port) (Lead wire length) 53.5 [60.5] 50 7.5 16.5 24.5 11 11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3 40(R)-L-01 3 4 5 M plug connector (M): 10-SY3 40(R)-M-01

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Air Cylinder

Stroke CJ2ZB 10 16 Z NDh8 WA WB Mounting nut Section Y detail Y Rod end nut GA GB Piping port M5 x 0.8 WW Piping port 2 x M5 x 0.8 NN MM C C D B 0 0.3 B 0 0.3 B 0 0.3 Head cover port location Axial location (R) B 0 0.3 H A F NA Z + Stroke S + Stroke NB : The overall cylinder length does not change.

KJ

M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats 7 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 I H G F E D A B C Model 7 8 15 16 5.5 6 6.5 8.5 1.8 2.5 7 8 12 13.5 8.5 9.5 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.