Flow Control Equipment

-01 AS22l0M-02 0.8 Supply pressure 0.5MPa Supply pressure 0.5MPa Supply pressure 0.5MPa 50 10 20 0.15 0.3 Effective area (mm2) Air flow (l/min(ANR)) Air flow (l/min(ANR)) Air flow (l/min(ANR)) 40 Effective area (mm2) Effective area (mm2) 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 Number of needle rotation (Turns) 5 10 0 0 0 0 0 Number of needle rotation (Turns) 5 10 Number of needle rotation

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

A

L I D E R T Y P E L O W S P E E D R O D L E S S C Y L I N D E R O P T I O N XB13 NC(D)Y2 S XB13 NCY2 B S W I T C H B O R E S I Z E S T R O K E ( I N C H) B O R E S I Z E S T R O K E A D J U S T M E N T M A G N E T I C H O L D I N G P O W E R M A G N E T I C H O L D I N G P O W E R S T R O K E ( I N C H) Type Basic Type / Slider Type T E C H N I C A L SPECIFICATIONS B A S I C T Y P E X B

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

3 Port Solenoid Valve Metal Seal Series VZ200 1

M5 x 0.8 (Pilot EXH) 1 2 1 2 DIN terminal: VZ2 5-D(Z)-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (

CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing M P D 45.4 49.4 49.6 52.4 56.7 61.3 64.5 67.5 69.7 72.7 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 7 8 9 10 15 17 23 25 29 30 KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Orifice symbol (diameter) Solenoid valve (Port size) DC 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6mm) VX21 VX22 VX23 Model Class H 01 ( ) 02 ( ) 1 8 Rated voltage S L Z 1 4 02 ( ) 03 ( ) 02 ( ) 03 ( ) Port no.

0.4

unit S kit P kit F kit L kit !

Series KG Stainless Steel One-touch Fittings

A P D1 D2 Q M L I 1 8 KGUD04-01 18 26 43.5 47 13 10.4 21 39.5 41 4.2 4.2 4 9.7 16 10.4 12.8 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 50.5 53.5 26 46.5 47.5 13.4 13.4 11.7 12.8 17 6 12.8 15.2 31 17 128 Stainless Steel One-touch Fittings Series KG UnionY: KGU Effective orifice(mm 2) Applicable tube O.D.

VEX1

Calculation by effective area Q: Flow rate (l/min) P: Pressure differential (P1P2) P1: Upstream pressure (MPa) P2: Downstream pressure (MPa) G: Specific gravity (Air = 1) : Temperature (C) S: Effective area (mm2) P(P2+0.1013) G 273 273+ Q=226S . ... l/min(ANR) wEquation in the domain of sonic flow. . 273 273 + Q=113S(P1+0.1013) 1 G . l/min(ANR) External Pilot Piping VEX312 VEX332 VEX350 VEX370

KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Applicable tubing O.D. mm Weight g 2-Applicable tubing M P D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 45.4 49.4 49.6 52.4 56.7 61.3 64.5 67.5 69.7 72.7 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5

VS 8-2/VS 8-4

Terminal block box (Terminal block) Terminal block box P.3, 17 P.3, 17 T kit IP65 compliant IP65 compliant IP65 compliant Electrical entry IP65 enclosure with use of multiple wire cable with sheath and waterproof connector Lead wire P.3, 19 P.3, 19 L kit 25-core cable 26 pins Circular connector Circular connector IP65 enclosure with use of waterproof circular connector P.3, 21 P.3, 21 M kit

5 Port Solenoid Valve SY Series

(-F ) G H 1 2 23 32.3 (A, B port) 1/8 0.8 1.6 16.2 (20) 15 EA P EB 28.1 [32] For manifold gasket positioning 22.2 die-cast hole (P, EA, EB port) 1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

JXCx-OMT0061CN

LED() /P.19 5. /P.21 6.CN1: 1 LED ->/P.19 5. ->/P.32 10.1 CPU -> CPU L RUN()L ERR() L RUN L ERR 2 / L RUN()L ERR() CC-Link ->/P.28 8.LED ->/P.77 17.C-Link 3 ALM ->/P.71 16. USB USB PC USB USB LEC-W2 COM PC COM COM COM COM PC COM LEC-W2 4 (LEC-W2) (LEC)== =USB =PC (LEC) OFF PC (LEC) (PLC )(PC ) 90 - ONOFF PLC ->/P.32 10.1 ->/P.12 3. ->/P.19 5.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-www.stevenengineering.com VZS VFS VS4 VQ7 EVS VFN ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Secondary Batteries

/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35