Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) M9B M9BV 2-wire 12 V 24 V Relay PLC Yes Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ 12 V Solid state switches marked are produced

MXQ

MXQ6(L) 6 19 7 7 M2.5 x 6 12.5 M2.5 x 8 8 2.5 6 8.3 M5 x 0.8 M MXQ-AS6(L)-X11 15 26.5 MXQ-AS8(L) 5 19.5 B MXQ8(L) 7 22 7.5 8 14.6 9 3 7 9.8 MXQ-AS8(L)-X11 M3 x 8 M3 x 10 15 29.5 M6 x 1 F MXQ-AS8(L)-X12 25 39.5 E G MXQ-AS12(L) 5 23.5 MXQ12(L) M4 x 12 M4 x 12 M8 x 1 MXQ-AS12(L)-X11 9.5 29 11 12 18.5 14 4 10.5 12.7 15 33.5 C MXQ-AS12(L)-X12 25 43.5 MXQ-AS16(L) 5 24.5 Table mounting section

ZSE F/ISE

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Lead wire length symbols: 0.5 mNil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z Auto switches marked with are made-to-order specifications.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Lead wire length symbols: 0.5 mNil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z Auto switches marked with are made-to-order specifications.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive

CRQ2

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

Table of Contents

L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.

Rotary Cylinder Series MRQ Size: 32, 40 1

Nil L Z N 0.5 m 3 m 5 m None (Example) A73C (Example) A73CL (Example) A73CZ (Example) A73CN Refer to page 11-11-36 for detailed solid state switches with prewire connectors. Since other auto switches are available other than those listed above, refer to page 11-10-16 for details on other applicable auto switches.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

F/ISE

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Compact

The spacing (L) of the intermediate supports must be no more than the values shown in the following graph. 25 LEMH32 20 Load mass m [kg] LEF m 15 LEJ LEMH25 L 10 LEL 5 LEM LEM m 0 0 200 400 600 800 1000 1200 1400 L LEY Support spacing L [mm] m LES 25 LEPY LEPS L L LEMHT32 20 Load mass m [kg] LER 15 LEH LEMHT25 m m 10 LEY -X5 L 5 11LEFS 0 0 200 400 600 800 1000 1200 1400 11LEJS Square nuts

OMR0032

Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red * Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black I/O

Thermo-con/Rack Mount Type

) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A2 [Bracket B (ZS-46-A2)], Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)]

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A2 [Bracket B (ZS-46-A2)], Operation Manual: Operation Manual, Calibration Certificate

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: -