Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø4 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -
Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -
Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
PFxx-OMJ0005CN min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/
Max. suction flow rate 3 types available: 100, 300 *1 , and 600 *1 L/min (ANR) *1 Branch + Port exhaust Silencer Air consumption Max. suction flow rate: 600 L/min (ANR) 91% reduction (Under SMCs measurement conditions) ZL6 Series Suction: 300 L ZL3 Suction: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1
min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 1.2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or
Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!
'1l8 NPT G43-P10-N01 or KSl OB-AD1 1 (St.
C4H C6H N7H C4L C6L N7L M50.8 R1/8 NPT1/8 4 mm 6 mm 1/4 5/32 inch inch 4 mm 6 mm 1/4 5/32 inch inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 22 g 32 g 34 g 25 g 26 g 27 g 28 g 28 g 34 g 35 g 2(AWG26) 0.15 mm 1.0 mm (3 ) 3.4 -63No.PS-OMS0006CN-G M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L
Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry
min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics Conditions: Upstream pressure 2.0MPa Downstream pressure 0.8MPa Flow rate