53

IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 134 Thermo-chiller Inverter Type HRSH090 Series Circulating Fluid Temperature

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

LEC-OM02904

UVW)(UV W) U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

ASR

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

1/4, 1/8 port (A port) 25 12 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female

PFxx-OMJ0005CN

NPN ) NPN 1 V (80 mA )PNP 1.5 V (80 mA ) 1 s(50 ms0.5 s2 s) 1.5 s 15 V 1 k 420 mA 600 DC24 V 50 5F.S. -54No.PF-OMJ0005CN-I PFM710 PFM725 PFM750 PFM711 ()30 ms 3F.S.() LED 3 7 2 (/) OUT1ON OUT2ON DC24 V10 55 mA IP40 050 () 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) CE(EMC ROHS )ULCSA 110L/min10009.99 L/min 2100L/min100099.9 L/min 3 ()10024 551005009.5 221002003.8

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(initial value) Solenoid Specifications Electrical entry L type (for plug-in), M type plug connector (M) Rated coil voltage V Note) 24, 12, 6, 5, 3DC Allowable voltage fluctuation 10% of rated voltage Power consumption W 0.6 (with light: 0.65) Surge voltage suppressor Diode Indicator light LED Note) Only 24VDC and 12VDC are available for plug-in use.

Thermo-chiller

Required installation space 8 e r o m r o m m 0 0 Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 400 mm = 15.7 inch 800 mm = 31.5 inch 800 mm or more Piping Caution 78.7 inch (2000 mm or more) 1.

Soft Start-up Valve

+ 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC [115

SQ1000/2000

A Withstand pressure V, 1 minute, AC Station 11 1000 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Insulation resistance M/km, 20C Station 12 5 or less SOL. B 25 () (+) White None Note) The minimum bending radius for D-sub connector cables is 20mm. COM. 13 (+) () Orange Red Note) Negative COM spec. Positive COM spec.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Approx. 600 (Lead wire length) 85.2 [87.4] 128.8 [131] (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 80 [87] 57.5 [64.5] + 64.6 54 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): SYJ7140-M01 02 DIN terminal (D): SYJ7140-D01 02 M8 connector (W0): SYJ7140-W001 02 L plug connector (L): SYJ7140-L01 02 Applicable cable O.D. 3.5 to 7 Approx

Lightweight and Compact

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 73 Circulating Fluid Temperature Controller

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.

Gun Type Ionizer

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.