Table of Contents

Symbol Signal description Signal description Driver model MR-C10A MR-C20A MR-C10A1 MR-C20A1 Symbol Digital output power supply Failure Positioning complete Z phase pulse 1 2 3 4 5 7 8 9 10 11 12 13 14 15 16 17 19 20 V+ ALM PF OP SG NP NG PP PG Shield SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke end Normal stroke end Interface power supply Servo ON Open

Dedicated Controller

Symbol Signal description Signal description Driver model MR-C10A MR-C20A MR-C10A1 MR-C20A1 Symbol Digital output power supply Failure Positioning complete Z phase pulse 1 2 3 4 5 7 8 9 10 11 12 13 14 15 16 17 19 20 V+ ALM PF OP SG NP NG PP PG Shield SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke end Normal stroke end Interface power supply Servo ON Open

Electric Actuators

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Electric Actuator with Integrated Guide

Symbol Signal description Signal description Driver model MR-C10A MR-C20A MR-C10A1 MR-C20A1 Symbol Digital output power supply Failure Positioning complete Z phase pulse 1 2 3 4 5 7 8 9 10 11 12 13 14 15 16 17 19 20 V+ ALM PF OP SG NP NG PP PG Shield SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke end Normal stroke end Interface power supply Servo ON Open

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Table of Contents

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

AN

) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions ANA1-01 to 06 ANA1-06: PP

Air Fittings & Tubing

Tl Component Materials Body C3604BD, PBT, PP C3604BD (Thread portion) Stainless steel (SUS304) SUS304, C3604BD, Polyacetal (POM) Polyacetal (POM) NBR Stud Chuck Guide Collet, Release button Packing, O ring Order Made P.2.1-29 SUS304, NBR Gasket 2.1-10 Series KQ2 Model Universal male elbow Hex. socket head male connector P.2.1-13 KQ2S P.2.1-16 KQ2V Internal hex. allows thread connection by

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

KJ

Principal Parts Material Body C3604BD, PBT, PP C3604BD (Thread portion) Stainless steel 304 Stud Chuck Stainless steel 304, C3604BD, POM Guide POM Collet Release button Seal, O-ring Stainless steel 304, NBR Gasket POM NBR 15-4-24 2 Inch-size One-touch Fittings Series KQ2 Model Basically, it is used together with male elbow.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Process Pump <Fluororesin Type> Series PA3000

Process Pump Series PA3000 With the use of New PF With the use of New PF high corrosion resis high corrosion resis High Corrosion High Corrosion Resistance Resistance Side bodies, Ports: New PFA New PFA Center plate PPS Diaphragms, O-rings: PTFE PTFE Diaphragms PTFE Side bodies New PFA Through bolts SS Resin covers PP Blue lines indicate wetted parts.

0.01 to 0.03C)Refer to performance chart.Approx. 0.32 gal (1.2 L)IN/OUT: Rc3/8Drain: Rc1/4 (with plug)PPE, PP glass 10%, Alumina ceramics, Carbon, EPDM, Stainless steel 303, Stainless steel 304, PE, PP, NBR50 to 95F (10 to 35C) (no condensation)Within 145 psi (1 MPa)0.8 to 1.9 gpm (3 to 7 L/min)IN/OUT: Rc3/8Stainless steel 304Single-phase 100 to 240 VAC ?

Materials include PP, cotton, SUS304 (epoxy resin) and SUS316 (nickel solder).

Materials include PP, cotton, SUS304 (epoxy resin) and SUS316 (nickel solder).

0.01 to 0.03C)Refer to performance chart.Approx. 0.32 gal (1.2 L)IN/OUT: Rc3/8Drain: Rc1/4 (with plug)PPE, PP glass 10%, Alumina ceramics, Carbon, EPDM, Stainless steel 303, Stainless steel 304, PE, PP, NBR50 to 95F (10 to 35C) (no condensation)Within 145 psi (1 MPa)0.8 to 1.9 gpm (3 to 7 L/min)IN/OUT: Rc3/8Stainless steel 304Single-phase 100 to 240 VAC ?

Materials include PP, cotton, SUS304 (epoxy resin) and SUS316 (nickel solder).

0.01 to 0.03C)Refer to performance chart.Approx. 0.32 gal (1.2 L)IN/OUT: Rc3/8Drain: Rc1/4 (with plug)PPE, PP glass 10%, Alumina ceramics, Carbon, EPDM, Stainless steel 303, Stainless steel 304, PE, PP, NBR50 to 95F (10 to 35C) (no condensation)Within 145 psi (1 MPa)0.8 to 1.9 gpm (3 to 7 L/min)IN/OUT: Rc3/8Stainless steel 304Single-phase 100 to 240 VAC ?