Fluoropolymer Piping Equipment

21.2 LQ1B54-M 12 9.4 8 39.5 18 36 36 69.5 45 49 LQ1B6D-M 3/4" 15 LQ1B58-M 19 1/4" 27.5 33.5 6 6 LQ1B6F-M 1" 1/2" 37 10 10 LQ1B59-M 19 3/8" 29 35 10 10 LQ1B61-M 25 3/4" 36 16 16 Note) Products marked are produced upon receipt of order.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-10-FG-D-M0 EVS7-10-F G-D-M0 H J I 232 232 124 124 45 (12 port) 45 (14 port) 45 (12 port) 45 (14 port) 22 (4 port) 22 (2 port) 22 (4 port) 22 (2 port) 2 12 14 4 14 4 2 12 50 80 95 SMC SMC A B SMC 50 80 SMC B A 95 Manual override 5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard Stroke Bore size (mm) Standard stroke (mm) Auto switch Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Nil Without auto switch (Built-in magnet) 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread For the applicable auto switch model, refer to page 10-3-12.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard Stroke Bore size (mm) Standard stroke (mm) Auto switch Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Nil Without auto switch (Built-in magnet) 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread For the applicable auto switch model, refer to page 10-3-12.

Pneumatic Transfer System Series MF

: mm 6 12 Maximum collision speed: m/sec 0.05 to 5 0.05 to 5 2) Weight of straight types (Unit: kg) Maximum operating frequency: cycle/min 80 45 15 32 Bore size (mm) Ambient temperature range: C 10 to 80 10 to 80 2.3 Basic weight (for 0 stroke) 4.0 When expanded 1.96 6.86 0.1 Additional weight per 50mm of stroke 0.15 When compressed Spring force: N 4.22 15.98 Calculation/example MF32-SA300

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y 4 4 Connection 1.6 thread 29 B D 6 15 10 94 40 43 15 99 45 25 109 55 63 37 02 1.2 Width across flats 12 A N S U F GN GS 6 63 37 15 10 94 40 43 15 99 45 25 109 55 N4 N6 U4 U6 J K ZP Y U 04 A8 1.6 Width across flats 7 6 63 37 15 10 94 40 43 15 99 45 25 109 55 06 08 2.5 F 17.5 Dimensions Per Vacuum Inlet C2 Model E F Fitting part

Brake mechanism added

0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

LEC-OM02704CN

10 13(23) 5.8 (1) 10 (2) 10 (3) 132 3 2 6 3CC-Link 3 CC-Link .2 3.1 .2 3.2. .3 3.2.1 .3 3.2.2 .4 3.2.3 .7 3.2.4 .8 3.2.5 .8 3.3 .9 3.3.1 .9 3.3.2 .9 3.4 .10 3.5 CPU () .10 3.5.1 () .10 3.5.2 .14 3.5.3 .23 3.5.4 (RWwn2RWwn3) .24 3.5.5 (RWrn2) .32 3.5.6 CN6 .33 3.6 .35 3.6.1 .35 3.6.2 .37 3.6.3 .39 3.7 .42 3.7.1 .42 3.7.2 .45 3.7.3 .46 3.7.4 .47 3.7.5 .50

Slider Type Ball Screw Drive/11-LEFS Series

50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23 Speed [mm/s] Note 2) 10 to 500 5 to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 Max. acceleration/deceleration [mm/s2] 3000 Actuator specifications Positioning repeatability [mm] Basic type 0.02 High precision type 0.015 [mm] Basic type 0.1 or less Lost motion Note 3)

HRX-OM-W002

20 30 40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz

SMC Pneumatic Clean Series

10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Series PF2W Digital Flow Switch For Water

PF2W704 Model PF2W740 PF2W711 Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 L/min 0.35 to 4.5 L/min 3.5 to 45 L/min 7 to 110 L/min 1.7 to 17.0 L/min 0.35 to 4.5 L/min 3.5 to 45 L/min 7 to 110 L/min 2 to 16 L/min 0.5 to 4 L/min 5 to 40 L/min 10 to 100 L/min 0.1 L/min 0.05 L/min 0.5 L/min 1 L/min 0.1 L/pulse 0.05 L/pulse

CLQ

CLQ 157 245 402 629 982 1559 2513 3927 M5 x 0.8 Rc 1/8 Rc 1/4 MLGP Symbol Specifications Equivalent to 0.5 MPa -XA Change of rod end shape RLQ Standard Stroke MLU Bore size (mm) Standard stroke (mm) 20, 25 32, 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 ML1C DManufacture of Intermediate Stroke -X Description Part no.

•

'13'16 10 .

CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

Compact Cylinder with Lock Series CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

HRX-OM-X071

Fig 9-15 Required facility water flow (HRR050-W-20-) 9.7.2 HRR050-W-4030 Facility water flow rate [L/min] 25 20 15 10 5 0 0 5 10 15 20 25 30 35 40 45 Facility water inlet temperature [] The amount of the facilitywater for the opution with rated circulating fluid, cooling capacity which is described in fig.9-10.

CLA

. -750 20750 37 40 11 6 140 V, V. 92 30 52 " 124 21 31 76 25 19 M 1 2x1.75 11 58 131 M26X l .S (mm) XfUS H Z ZZ eo , h X Z ZZ Bore size MM N P PG PH PL PW RR S U W eCD Kl0 CX WtthOut boot With boot 40 VIS 20 27 Yo 42 11 20 45 10 153 16 8 1O'g , o~e 15e8 1 51 234 244 43 11.2 59 242 252 50 30 0/0 46 10 21 50 12 168 19 0 10. 0 18:~ a 58 261 273 52 11.2 66 269 281 83 % -16 31 % 48.5 13 23 60