(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure

capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure

capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure

capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure

EXxx-OMQ0015CN

(3)B180(1/2) (1) (2) (3) A B C (EX600-ZT1) -14No.EX-OMQ0015CN SI EX600-S SI 1 /PNP 2 /NPN PN PROFINET No. 1 LED 2 3 (BUS OUT) 4 5 (PCI) 6 MAC 12MACSIMAC 7 8 9 10 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -15No.EX-OMQ0015CN BUS IN BUS OUT 1 TD+ 2 RD+ 3 TD4 RDIP67 -16No.EX-OMQ0015CN LED LED ST(M) PWR PWR(V) SF BF L/A IN BUS IN L/A OUT BUS OUT SI OFF SI ST(M) PWR PWR(

Fieldbus system Ethernet POWERLINK compatible SI unit

SPEEDCON connector wiring method is explained below. (1) Align the mark B on the metal bracket of the cable side connector (plug/socket) with the mark A. (2) Align the mark C on the unit and insert the connector into the unit vertically.

PF3A7xxH_eng

(For accumulated increment) [1000] 1000 L/min (PF3A702H) [F 1] [ 50] 50 L/min (PF3A701H) Reset the accumulated flow. (Press the and buttons simultaneously for 1 second or longer) [ H] Setting of Hysteresis Sub display In measurement mode, the display of the sub display can be temporarily changed by pressing the or buttons.

CG1-SMV13_en

Bore Size (mm) 25 32 40 50 63 80 100 Limited warranty and Disclaimer Warning Stroke (mm) 1) The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first(1). Also, the product may have specified durability, running distance or replacement parts.

Rotary Table

Output operation of the solid state auto switch is not stable for 50 [ms] after powered ON. In the output operation immediately after powered ON or AND connection operation, the input device (PCL or relay, etc.) may judge the ON position as OFF output or the OFF position as ON output.

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

Compact Guide Cylinder

INFORMATION Compact Guide Cylinder With Flange 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Plate side flange type added.

Low torque Metal seal type Rotary joint

bracket Number of circuits Flange part number 2 circuits MQR2-F 4 circuits MQR4-F 8 circuits MQR8-F 12 circuits MQR12-F Specifications Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[