Smooth Vent Valve

x 0.8 Weight (kg) 0.5 Dimensions 40 Not available to mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations 735 AS1F-D Series Construction Universal type Meter-out type Elbow type Meter-out type M5 type U10/32 type M5 type U10/32 type Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 736 AS1F-D Series Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal

MXW

Body tapped H l Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Model Bolt D 5H9 + 0.030 depth 4.5 2.1 6 MXW8 M4 x 0.7 0 5H9 + 0.030 depth 4.5 6 2.1 MXW12 M4 x 0.7 0 Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Bolt Model 6H9 + 0.030 depth 5.5 9 4.4 MXW16 M5 x 0.8 0 6H9 + 0.030 depth 5.5 5H9 + 0.030 depth 4.5 13 4.4

MHF2

Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 0 80 60 40 20 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable

MHF2

: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations 15-9-76 3 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Construction Universal type Meter-out type Elbow type Meter-out type M5 type U10/32 port M5 type U10/32 port AS ASP

CJ2X/CUX/CQSX/CQ2X/CM2X

CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

CC 2.55 10% M5 4.02 10% M6 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

Compact

L L Model Screw size Maximum tightening torque [Nm] L (Maximum screw-in depth)[mm] LEMBl M5 x 0.8 3 8 LEMC25 LEMH25 M4 x 0.5 1.5 7 LEMC32 LEMH32 M5 x 0.8 3 9 6. Do not dent, scratch or cause other damage to the body and table mounting surfaces. This may cause unevenness in the mounting surface, play in the guide or an increase in the sliding resistance.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Bottom Mounting Style / CJ2RA, CJ2RA 10112122X GC Y Relief port M5 x 0.8 GA GB Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 MM C D B 0 0.3 L LX B 0 0.3 LB LH Head cover port location Axial direction (R) NA H A Z + Stroke S + Stroke NB 2 x LD The overall cylinder length does not change.

Speed Controller with Indicator

In addition, the universal type is only available with 180 setting. 5 Speed Controller with Indicator Series AS-FS Needle Valve/Flow Rate Characteristics AS101FS-M5, AS111FS-M5 AS201FS-01, AS211FS-01 AS201FS-02, AS211FS-02 600 300 AS-FS AS-FSG Uni-AS-FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate

MXH

(Nm) 2.5 5.1 5.1 8.1 Bolt M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 12.7 15.6 20.6 24.0 12.7 15.6 20.6 24.0 9.4 11.2 16.2 16.0 Vertical Mounting (Body tapped) Axial Mounting Style (Body tapped hole) l Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 l Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 Model MXH6 MXH10 MXH16 MXH20 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ SS 20 10 9 2 x 4.3 through Z 2 x 8 counterbore depth 4.4 18 5 30 1 M6 x 1.0 x 5 L (Hexagon socket set screw) 450.2 450.2 48 56 25 58 6.3 5 2 x M4 x 0.7 thread depth 6 1 M4 x 0.7 x 14.5 L and M4 x 0.7 (Hexagon bolt) (Hexagon nut) 9 M5 x 0.8 x 10 L (Hexagon socket head cap screw) 2 x M5 x 0.8 (Through-hole) (Z) 2 x M5 x 0.8 thread depth

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 12.3 28.6 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 14.3 36.1 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.