VQZ1000/2000/3000

2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | SolenT NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | SolenT NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Applicable Auto Switch Model

Note 2) Refer to p.5.3-5 for lead wire length.

Suction Guard (Produced upon receipt of order) FHG Series

Weight values are for the minimum T dimension (symbol 1) in each standard T dimension. Weight values are for the minimum T dimension (symbol 1) in each standard T dimension. The OUT direction can be mounted up to 90 to the left or right.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

OMR0032

Controller Set Up (P.42) and 14. Card Motor Controller Configuration software (P. 70) for instructions on how to setup. (7) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.50) and 14.5 Monitor/Test window (P. 80) for instructions on operating instruction of test operation 14 - 3.

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: 01 (R1/8)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: R1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -