AC Servo Motor Driver (Network card type ）

SIGNALS AND WIRING (3) Encoder output pulses DO-2 (differential line driver type) (a) Interface Maximum output current: 35 mA driver driver Servo amplifier Servo amplifier LA (LB, LZ) LA (LB, LZ) 100 Am26LS32 or equivalent 150 LAR (LBR, LZR) LAR (LBR, LZR) High-speed photocoupler LG SD SD (b) Output pulse Servo motor CCW rotation LA Time cycle (T) is determined by the settings of [Pr.

Compact Hydraulic Cylinder

Right LB Rod end thread type Left LD Nil M Female thread Male thread Rod end thread type is an optional product. (Refer to page 186). Note) Indicates the relative position of the foot bracket and port, as seen from the rod side.

LEC-OM02704CN

G3-G4 120V AC/DC 0.5A/4.8VDC 2.4VA 13 11 13 (4) (a) LEC-MR-RB-032LEC-MR-RB-12 [mm] TE1 G3 6 6 LA G4 LB (12) P (6) C 0.5~0.6[N m] M8 MR-RB 144 12 6 156 168 M5 5 3.24[N m] G3 G4 P C TE1 1.6 6 [kg] LA LB LC LD (20) LD LC LEC-MR-RB-032 30 15 119 99 0.5 LEC-MR-RB-12 40 15 169 149 1.1 13 12 13 13.3 LEC-MR-J3BAT (IATA)(44)200311 (Class9)24 24903 (20083) (1) LEC-MR-J3BAT 5.7 (2) LEC-MR-J3BAT

LEC-OM07605CN

(3)DO-2() (a) 35mA LA (LB LZ) L A (LB LZ) 100 Am26LS32 150 LAR (LBR LZR) LAR (LBR LZR) LG SD SD (b) CCW LA (T)[Pr. PA15][Pr.

XL

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

Title not found

6.4516 ft2 0.0929 Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 sal(U.S.)3.78s Energy tt. lb ft. lb 1.356 N.m 1.356 J 3.6 MJ tt. lb ft. lb L L Power ft. lb/s hp 1.356 W 0.7457 kW s Kg Weight oz 24329 tb 0-4536 ft . lb/s np Temperature "c = 5/sfF-32) Force Temperatule gl 2.205 x '10-3 lbf 'F=(1.8x'C)+32 kSt 2.2046 lbl N 0.2248 lbf Flow raie Nl/minx0.035=SCFlVl Force tbf 453.6 tbf 0.4536

asilltr

^ 9troh6 056 ('g/s') 5 t b 3.5 lb/in 1.75 lblin 075 \%') 6.5 tb 4 lb/in 2 lb/in 106 (1%;) 7.75 tb 4 lblin 2 lblin 150 t1%') 8 r b 3.4 lb/in 1.7 lblin 2OO 12\ 1 2 t b 8 lb/in 3 lblin 250 (2%') 18.75 tb 8.25lblin 3.5 lb/in 300 (3) 23 rb 10.5 lb/in 3.75 lb/in 400 (4') 26.5 tb 8.5 lblin 3.5 lb/in Series NCQT Constru.ction Spring Retum Rubber Bumper Double Ac'ting Sgring Extend 1 4 Bumper B Urethane

Air Cylinder CLA Series Fine Lock Model

6.4516 ft2 0.0929 Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 sal(U.S.)3.78s Energy tt. lb ft. lb 1.356 N.m 1.356 J 3.6 MJ tt. lb ft. lb L L Power ft. lb/s hp 1.356 W 0.7457 kW s Kg Weight oz 24329 tb 0-4536 ft . lb/s np Temperature "c = 5/sfF-32) Force Temperatule gl 2.205 x '10-3 lbf 'F=(1.8x'C)+32 kSt 2.2046 lbl N 0.2248 lbf Flow raie Nl/minx0.035=SCFlVl Force tbf 453.6 tbf 0.4536

Slide Tables MX Series

Lateral Mounting (Through Holes) Lateral Mounting (Tapped Holes) l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Max. fastening torque in lb (N m) Bolts M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 22 (25) 45

Air Cylinder NCQ7 Series Compact Cylinder

^ 9troh6 056 ('g/s') 5 t b 3.5 lb/in 1.75 lblin 075 \%') 6.5 tb 4 lb/in 2 lb/in 106 (1%;) 7.75 tb 4 lblin 2 lblin 150 t1%') 8 r b 3.4 lb/in 1.7 lblin 2OO 12\ 1 2 t b 8 lb/in 3 lblin 250 (2%') 18.75 tb 8.25lblin 3.5 lb/in 300 (3) 23 rb 10.5 lb/in 3.75 lb/in 400 (4') 26.5 tb 8.5 lblin 3.5 lb/in Series NCQT Constru.ction Spring Retum Rubber Bumper Double Ac'ting Sgring Extend 1 4 Bumper B Urethane

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

SMC Pneumatic Clean Series

With air cushion WW WW WA WB Piping port M5 x 0.8 Cover surface MM NN GA GB F GC Piping port 3-M5 x 0.8 C D LY LB LH A LT X Y NA NB B 0 -0.3 LX S + Stroke H Z + Stroke LZ Head cover port location Axial direction (R) 2-LC Mounting hole (mm) LZ 42 42 LY 25 25 LX 33 33 LT 2.3 2.3 LH 14 14 Y 9 9 NN Z WW WA WB Bore size A M4 x 0.7 D GC B F H MM GB GA C 102.5 101.5 5.5 4.5 20 20 NB LB 21.5 23 S

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

Hydraulic

Mounting types Basic type Transaxial foot type Axial foot type Front rectangular flange type Front square flange type Center trunnion type B LA LB FA FC TC Rod size series Port and cushion valve positions B C B-series rod size C-series rod size Refer to page 78.

Compact Slide Series MXH

4 x M4 x 0.7 Depth 6 12 10 + Stroke NS LT LB LA J Stroke (mm) 5 58 20 10 4 10 20 58 10 4 15 30 68 4 20 20 30 68 20 4 25 78 40 30 4 30 40 78 30 4 40 50 88 6 20 20 50 60 98 25 6 25 60 108 60 30 6 30 D-X Individual -X 27 Series MXH Dimensions: 20 LT 31 20 J x M5 x 0.8 Depth 9.5 LA LB 14 3 x M6 x 1.0 through Bottom hole dia 5.1 6 x 9.3 counterbore depth 8 Plug for port (Hexagon socket

JIS Standard Hydraulic Cylinder

Bore size 32 40 50 Mounting type 63 80 100 Made to Order specifications For details, refer to page 359. 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Series type B LA LB FA FB FY FZ FC FD CA CB TC Basic type Transaxial foot type Axial foot type Symbol E F H Tube material Aluminum alloy Stainless steel Stainless steel Nominal pressure 3.5 MPa 7 MPa 14 MPa For 3.5 & 7 MPa Cylinder options Rod rectangular

39

Release point Y LB (mm) Bore size (mm) LB Y 50 63 78.4 132 Cover open 78.4 138 7 Series CKZ3N Dimensions Arm / 50 Straight-Plain 20 mm Offset-Plain 16 200.03 200.03 A M61.0 A M61.0 R45 33 530.05 6.5 32 6.5 10 19 R25 10 R25 19 18 R6 19 18 R6 19 A 90.0 120.0 150.0 A 90.0 120.0 150.0 Weight kg 0.6 0.7 0.9 Weight kg 0.7 0.8 1.0 Part no. CKZ-50A001 CKZ-50A002 CKZ-50A003 Part no.

MXH

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30 4 30 40 45 72 6 20

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

1,543 1,323 1,102 882 661 441 220 0 Mass of transferred object m [lb] Mass of transferred object m [lb] Upper limit 80 Operating range 80 Operating range Upper limit Lower limit Lower limit 32.8 65.6 98.4 131.2 0 32.8 65.6 98.4 131.2 0 Transfer speed [ft/min] Transfer speed [ft/min] Front matter 1 Model Selection Series RS2H Lateral Load and Operating Pressure The greater lateral load

LEC-OM02904

A () No.PA151 CCWBA/2 ABNo.PC03 (5.1.10) B () LA CN3-6 LAR CN3-16 LB CN3-7 LBR CN3-17 Z () LZ CN3-8 11 ON () LZR CN3-18 400s100r/min 1 MO1 CN3-4 [Pr. PC09]MOl-LG 10 2 MO2 CN3-14 [Pr. PC10]MO2-LG 10 (D) No.