Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Multistage Ejector Series ZL

Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent plug P397110 Other than vacuum switch 8 Lead wire cover P397176 Vacuum switch specifications Front cover B With valve 12 Valve plate With valve 13 Needle With valve 14 Supply valve (N.C.) With valve SYJ514 15 Release valve (N.C.)

SFOD-OMT0012

Otherwise, this may cause injury and/or an accident. 14 No.SFOD-OMT0012-A (1-5) STOP button When the STOP button at the top of the main window is selected while the actuator is operating, all of the connected actuators will stop by reducing the speed. However, the operation is not stopped when the Stop button is selected in the cases shown in the following Caution.

SFOD-OMT0011CN

SFOD-OMT0011 2015 7 2016 3 A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0011CN-A

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

Refer to " LECY operation manual (Simplified Edition) for details of parameters recommended value of each actuator. 3 4 14 - 4.4 Saving Parameters (Online) Saving parameters has done in Online or Offline. 1. From the menu bar, click Parameters(U)-Edit Parameters(U). The Parameter editing window will be displayed. 2. Click the button to save of the "Parameter Editing" window.

LA-OMT0056

Use a PLC for the verification of the response or accuracy of the actual card motor. 14 - 4Start up procedureOperation by PLC The Card Motor operates based on input/ output signals sent from a PLC. Before operating the product using the PLC, perform the basic settings and the step data setting to the controller. (Refer to the section 2.2 Controller Setting for the setting instructions.)

IDX-OM-W029

Series 1-1 1 2 IDX-OM-W029 1 IDU55E,75E OUT IN (ONOFF ) (EVAPORATING TEMP) 5-2 5-2 (6 ) AC200V AC230V L1 L2 L3 PE L N PE M3 6.5mm 1.25mm M3 6.5mm 1.25mm 2 2 IDU Series 1-1 1 3 IDX-OM-W029 1 () IDU Series 1-1 1 4 IDX-OM-W029 2 2 2-1 IDU22E75E 90170kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14

IDX-OM-W095

IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3 3.1 50kg IDFC60/70/80/90 Series 3-1 IDX-OM-W095 3.2 3.2.1 (85%) 2045 050 () 2000m 600 mm 600 mm 600 mm 600 mm 600 mm 3.2.2 7 7.3 IDF-AB500 14

Pressure Relief 3 Port Valve with Locking Holes

How to Order added *2 and *3. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

VBA-OM-S001

OUT port Mounting VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) Drain port Rc1/4 (4) O-ring : Mount the O-ring in the groove on the joint of the tank at the back of the booster regulator.

PSxx-OMQ0004E

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013-2018 SMC Corporation All Rights Reserved PS-OMQ0004-B

ISA3-IOLink.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SET 2 secs. Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved PS-OMW0010

PSxx-OME0003CN

No.PS-OME0003CN-F / / PSE53 SMC 2 8 8 9 9 11 12 12 14 -1No.PS-OME0003CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

SY3000V-OMY0001

32V 3 3 A B , 10 No.SY3000V-OMY0001 SY series DIN a b DIN DIN DIN 25 2 610 3 1115 4 1620 5 2124 6 DIN DIN DIN A B a b 5 D PC 1 D (IP40) PC FREE LOCK LOCK FREE 11 No.SY3000V-OMY0001 SY series AB 4(A),2(B),1(P),3/5(E) 12 No.SY3000V-OMY0001 SY series 1) 0.1mm 2) 0.1mm 3) +0.15mm 0.2mm 1) TK-123 , 2) 13 No.SY3000V-OMY0001 SY series SY : KQ2H, KQ2S KJH, KJS 14

VQZ100V-OMT0001

16 No.VQZ100V-OMT0001 Revision history TW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.VQZ100V-OMT0001

VP300-OMP0001

O. 1(P) 14 No.VP300-OMP0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved No.VP300-OMP0001

VT325-OMT0001

VT325-OMT0001 VT325 Series VT325 Series VT325 Series VT325 Series 3 3 3 3 / / / / / / / / C-R ( ) C-R DC 2% AC 15% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC AC 1 (C-R ) OFF 2)() 1V -10 () () ( ( ( ( ) ) ) ) () 1 DC N.O.() 3 () 4 VT325-OMT0001 VT325 Ser VT325 Ser VT325 Ser VT325 Series ies ies ies 3 3 3 3 / / / / ( ( ( ( ) ) ) ) DC 1 ()ISO VG32 (MSDS) 1 Rc Rc Rc Rc 1 Nm Rc 1/4 12 14

EX510-GDN1.eng

Fieldbus system DeviceNet Compatible GW unit Operation Manual EX510-GDN1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2017 SMC Corporation All Rights Reserved EX-OMH0023-

EX250-SPR_eng

O: Sensor: OFF 1: Sensor: ON 3 Input block connector Connects the Input block. 12 8 Output block connector Connects the solenoid valve, Output block etc. 4 SW 1 5 13 9 Safety Instructions SI unit 5 Display window LED display shows the SI unit status. 2 6 14 10 HW 6 Switch protective cover Sets the address etc. with the switch inside. 31 29 27 25 23 17 3 7 21 19 15 11 Address setting mode