3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !
9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.
VQZ2000 (12.6) VQZ3000 (21.6) VFR2000 (16.2) VFR3000 (41.4) VFR4000 (67.0) 0.5 0.1 0.3 In-line type VFS1000 (9.0) VFS2000 (18.0) VFS3000 (36.0) VFS4000 (64.5) 2-B 5 AS221F (3.5) AS231F (3.5) AS2051F (4.5) AS220 (2.9) AS2000 (3.8) AS3001F (6.5) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2
1 !1 !2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.
9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.
SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70
A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1
hole) The dimensions show the PFMV5-1.
Part No. of auto switch mounting bracket (including nut, screw and spacer) Bore size (mm) 12 BQ-1 Cylinder series 40 BQ-2 80 BQ-2 100 BQ-2 125 BQ-2 140 BQ-2 160 BQ-2 BQ-1 20 16 BQ-1 25 BQ-1 50 BQ-2 32 BQ-2 63 BQ-2 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BMU1-025 BMU1-025 BMU1-025 BMU1-025 BMU1-025 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 BQ-1 Mounting screw set (Stainless steel specification) Use the following
KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical
TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 US C R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.
5 o y i q t u !0 !1 e w r !3 !8 !7 @3 @0 !9 @4 @1 @2 @6 @5 @7 @8 LVM No.
(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.
(mm) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.
How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.
Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.