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IR30-OM04-F PRODUCT NAME Precision Regulator MODEL/ Series IR3120 Contents Safety Instructions 2~3 1. Specifications 4~5 2. Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8.

INDEX 1. Safety Instruction .2 2. Outline.6 3. How to Order.7 4. Specification.7 5. Mounting .7 5-1. Electrostatic sensor installation.7 5-1-1. Sensor head installation.7 5-1-2. Installation of the sensor amplifier.8 5-2. Circuitry and wiring chart.9 6. Performance.10 6-1. Output signal.10 6-2. Detection range.11 6-3. Cautions on installation .11 6-4. Timing chart .12 7.

NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the

Contents Bracket 1 pc. M6 x 10l (Hex. bolt) 2 pcs. BM58 Bracket set Ball valve/Rc 1/2 1 pc. Barrel nipple/R 1/2 2 pcs. Elbow/Rc 1/2 1 pc. Ball valve piping set ADH-C400 Note) The accessories (Option) are shipped unassembled, but packed in the same container.

The clamp arm is not locked 1. The relation between the shim depth automatically. and the clamp force is not correct. Insufficient clamp force. 1.

The connection is Rc 1/2. -11- 6. Warranty (1) Period: The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first. (2) Scope: For any failure or damage reported within the warranty period which is clearly our responsibility, a replacement product or necessary parts will be provided.

16DD-M9(W,A)V D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41 / 3 NPN 3 PNP PLC PLC 2 2 PLC PLC PLC PLC -13- AND(),OR() *50ms 3 NPN OR 3 NPN AND 1 1 1 2 2 2 3 PNP AND 3 PNP OR 1 1 1 2 2 2 2 AND 2 OR 2 AND ON , 2 ON 20V 2 OR OFF OFF 1 1 ON 2 2 ON =-2 OFF =2

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size ASV AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 AK 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 VCHC Note 1) L7: Reference dimensions Dimensions: AS5000 ASR ASQ 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9)

IR20-OM04-E PRODUCT NAME Precision Regulator MODEL/ Series IR2120 Contents Safety Instructions 2~3 1. Specifications 4~5 2. Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8.

R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8

11.6 44.8 6.3 19.6 31.7 13.7 13.7 AQ240F-07-07 AQ240F-07-00 13.7 15.4 6.2 40.7 8 10.0 1/4" 1/4" 12 6 12 40.7 6.2 15.1 27.3 13.7 13.7 AQ340F-07-07 AQ340F-07-00 16.8 20.3 7.1 52.2 13 11.8 1/4" 1/4" 13.2 11 13.2 52.2 7.1 20.0 33.1 16.8 13.7 557

1 i !8 y e !0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

Port size Calibration certificate (Only flow sensor) Symbol Port size Rated flow range None With calibration certificate Nil A 21 $ $ 04 $ 20 $ $ 40 $ $ 11 $ $ 03 04 06 10 12 14 3/8 1/2 3/4 1/1 1 1/4 1 1/2 The certificate is written in both English and Flow adjustment valve Japanese.

Rc 1/8 M5 x 0.8 Body side VZA422-P-01 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 M5 x 0.8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 0.49 0.11 2.2 0.57 0.19 2.4 N.C. M5 x 0.8 Sub-plate side 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2 11 1/4" 13.2 7.1 22.2 15-12-4

8@1@5 tyu@3@4 Order 1 pinion assembly per one unit.

Application Remarks Body ASSY XGT300-1-1AS XGT313-50336Special parts B Name Order No. Application Remarks Body ASSY XGT300-1-1-3AS Common exchange parts Name Order No.