SMC Corporation of America
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800) 258-9200-www.stevenengineering.com Black FR Double Layer Tubing Series TRB White 15-6-17 15-6-11 Red T Slightly flexible 1.0 MPa max. at 20C Black Blue White Soft Nylon Tubing Series TS 15-6-8 15-6-9 15-6-3 15-6-4 15-6-5 Yellow Flame resistant (Equivalent to UL-94 standard, material V-0) Red Green VMG Blue Yellow FR Double Layer Polyurethane Tubing Series TRBU Green Black White 15-6-21

Port size (nominal size B) 1.5MPa 5 to 60C 99% 1/8, 1/4, 3/8 1/4, 3/8, 1/2 Ambient and fluid temperature Dehumidification rate 0.38 0.55 Weight (kg) Note) Maximum flow rate at pressure 0.7MPa 2 years, or when pressure drop reaches 0.1MPa Element life Note) With auto drain is 0.15MPa 21 Related Products Related Products (Refer to the individual product catalogs for further details.)

Refer to pages 14-21-3 and 14-21-4 for Safety Instructions and Common Precautions. Piping Selection Warning Warning Use auto-drain under the following conditions. Otherwise, it may result in a malfunction. 1. Float type auto-drain (N.O.) 1) Use compressor with capacity more than 3.7 kw {400 l/min Be sure to pipe auto-drain under the following conditions.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Mounting/Adjustment F.R.L. Warning AV 1. Install the valve guide (on the opposite side of the handle) 60 mm away from the ground surface to facilitate maintenance inspection. 2.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Handling Operating Environment Warning Warning 1. Absolutely never use in an atmosphere where explosive gases are used. The compact manometer does not have explosion proof construction.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reducing effect: 30 dB or more. Large effective area Piping How to Use DIN Terminal Caution Caution Tightening the fittings and their torque When screwing fittings into the valves, make sure to tighten them to the proper torque values given below. Wiring procedures 1.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Feedback circuit (VEA252 only) P/I/D adjustment NULL adjustment Warning Integrator cicuit Driving circuit Voltage comparing circuit Electro-pneumatic proportional valve GAIN adjustment 1.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Power amplifier with feedback circuit Control circuit Electro-pneumatic proportional valve Pressure sensor Caution VEXP3141 1. Air supply Poor quality air could increase the spools sliding resistance, while preventing it from attaining its specified characteristics.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reduction capability of over 30 dB. Provides a sufficient effective area. Operating Fluid Piping Caution Warning 1.

Dimensions (N.O.) (44) W T R (Y) Z VC T 25 VDW IN port 2-3/8 l =280 l =300 : Thread type VQ VX2 (V) (X) 2.5 (N) VX (U) E C D G Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q S A VX3 C B VXA L1 L2 16 VN L3 LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21

Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum

Frequency (Hz) 50 60(53) 18 60 51(44) 12 Model Power source VX3 7.5 6 8 11 9.5 11.5 AC VXZ22 VXA DC 50 80 21 60 67 17 AC VXZ23 VN DC LVC JIS Symbol LVA OUT LVH IN LVD N.O.

CAT.ES70-21 A Series VC Direct Operated 2 Port Solenoid Valve for Air Series VCA Multipurpose Valve for Air Direct Operated 2 Port Solenoid Valve for Air Series VCA Series VCA Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity and wear resistance.

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

Straight Plunger/VM220-02-05, VM230-02-05 Panel mounted hole JIS Symbol 2 port 3 port 56N F.O.F. 0.5MPa supply 3.5mm P.T. 2mm O.T. 5.5mm T.T. 3.5-21 VM200 Series VM200 Roller Plunger/VM220-02-06, VM230-02-06 VM220-02-06S, VM230-02-06S JIS Symbol 2 port Panel mounted hole 3 port SlA VlA 56N F.O.F. 0.5MPa supply 3.5mm P.T. SlA 2mm O.T. 5.5mm T.T.

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)

See pages 31-39 for more information on SMC'S LC6 series drivers, Seiles uff EleGriGlcMflors 0inrmh$l$till$swm LXFH5B (30Omm) ft hlor-T;+ -r-I "kl T slot dimensions (21 ) J I shows the location ai which origjn poinl swirch opetales.

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

s1 be a 3 pos lon vave assembly Individual SUP/EXH spacer Series SVl000 sv1000 Spacer type Port s ze for Ser es SV2000/3000/4000 sx3000-22 I (M2 x 39 5) sv2000-21-6 ([I3 x 46) sv3000 21-3 (N44 x 5s) sY7000-r 1-r 1 sv2000 sv3000 sY5000 1r 15 sY9000-11-2 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported flow Cv p c h (mm) I\Ietal seal vQz10m Up to o5L) voz2m0 Up to o80 Up 10 ol00 voz300o