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V114-5LU Fluid Air Ambient and operating fluid temperature(oC) -10 to 50 (No freezing) Response time [ms] ON5 or less OFF4 or less Minimum operation frequency [Hz] 20 Lubrication No Mounting orientation Free Impact resistance/Vibration resistance (m/s2) 15030 Enclosure rating Dustproof Model No.

CDecember 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

Checks and Inspection Hose Circulating pump Water quantity 20 to 30 L/min Pressure 0.1 to 0.3MPa 0.10.3 2030 L/min Fig. 2 () Tank (drum can, etc.) b) Operation procedure when a cooling tower is used 1. If a cooling tower is used, supply the cleaning liquid and circulate it for a certain amount of time. 2.

IN (Dampness air) ID Series 6-4 Structure and operation principles 6 4 Revision history Rev DJanuary.2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Standard dew point -20: approx. 10 minutes 4. Ensure that intermittent pressure is not applied to the product. When there is a large quantities of dusts (solid foreign matters) in the supply air, follow above No.2, and mount the air filter or main line filter in the primary side of mist separator.

ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3. Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3, 3H, 5, 5H). * Note 4.

ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3. Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3, 3H, 5, 5H). * Note 4.

Specifications 2-1 How to Order Port size Model type Port size Symbol Symbol Type 02 RcNPTTSJUOJ 1/4 10 Cartridge M5 Female thread M5 20 Cartridge (Strainer) Note) "M5" can only be selected when SFB10* is ordered.

How to Order added *2 and *3. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

How to Order AW D 30 03 BE Body size Symbol Description 20 30 40 Nil N F 01 02 03 04 Nil Without mounting option B With bracket H With set nut (for panel mount) Nil Without auto drain C N.C. (Normally closed) Drain port is closed when pressure is not supplied. D N.O. (Normally opened) Drain port is opened when pressure is not supplied.

How to Order 30 03 BE AWD D Body size Symbol Description 20 30 40 Nil N F 01 02 03 04 Nil Without mounting option B With bracket H With set nut (for panel mount) Nil Without auto drain C N.C. (Normally closed) Drain port is closed when pressure is not supplied. D N.O. (Normally opened) Drain port is opened when pressure is not supplied.

Thread size Tightening torque (Nm) NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 NPT, R3/4 28 to 30 NPT, R1 36 to 38 NPT, R1 1/4 40 to 42 NPT, R1 1/2 48 to 50 (3) If the product is screwed in with excessive torque, a large amount of sealant will seep out.

Do not use the sealant in any form other than a tape type. 3/8 15 20 1/2 20 25 (4)Once the fitting has been tightened, Chamfered area for female thread backing it out to its original position often causes the sealant to become defective.

A Dimensions: SFE4G/5H/7J Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 -7- Dimensions (Bracket) 1) SFE-BR3 2) SFE-BR4/5/7 Dimensions: SFE-BR4/5/7 Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): The values inside the brackets are given as a guide. -8- Revision history

-2No.PS-OMU0008CN-D 1 / *3) 1 1.5 3) 1 1 -3No.PS-OMU0008CN-D () () () () -4No.PS-OMU0008CN-D () * UL UL1310 2 UL1585 2 30 Vrms (42.4 V )(2 ) UL (1 20 ) N G -5No.PS-OMU0008CN-D SUS630SUS304 * FG (35 N () () TSJ(Swagelok URJ (VCR)/ Swagelok,VCRSwagelok Company *() 6 33 -6No.PS-OMU0008CN-D () () 30 m DC(-)() () * ( ) () CE -550(5) SUS630()SUS304() () / -7No.PS-OMU0008CN-D * 1015

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Option Setting Set the optional function in accordance with steps 19 to 20 below. (19) Click Option to display the Option Setting screen. (20) The Option Setting screen is displayed. Items that are checked will function. Uncheck unnecessary items. The setting can be reset by clicking the Default button. 8.

As a guide, insert bolts in 2 locations for 2-5 stations, 3 locations for 6-10 stations, 4 locations for 11-15 stations, 5 locations for 16-20 stations and 6 locations for 21-24 stations. Caution 2. When using the manifold with DIN rail in an environment where any vibration or impact is applied to it, the DIN rail itself may be broken.

As a guide, insert bolts in 2 positions for 2-5 stations, 3 positions for 6-10 stations, 4 positions for 11-15 stations, 5 positions for 16-20 stations and 6 positions for 21-24 stations. Take the same measures for horizontal mounting if the mounting surface vibrates. 2.

No. 15 No.VFS4000-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved No.VFS4000-OMY0001