REA/REB

9 46 80 8.5 16 21.6 5 9.5 9.5 53 52 21 23 18 9 54 90 8.5 7 4 14 8 16 26.4 6.5 11 9.5 64 64 24.5 12 26.5 26.5 66 7 9.5 110 5 20 8 16 33.6 10.5 14 8 74 30.5 28.5 76 35 130 78 12 10.5 20 5 10 10 8 41.6 25 14 11.5 PA PB PW LD M N L JK NN P MM Model HS HT J REAL15 REAL20 REAL25 REAL32 REAL40 95 7.5 45 70 8 9.5 75 5.6 M5 x 0.8 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 90 120 50 5.6 10 10 86 10 M10 x 1.0

REA/REB

9 46 80 8.5 16 21.6 5 9.5 9.5 53 52 21 23 18 9 54 90 8.5 7 4 14 8 16 26.4 6.5 11 9.5 64 26.5 24.5 64 26.5 110 66 12 9.5 16 5 7 8 8 33.6 20 14 10.5 76 74 28.5 12 35 30.5 78 10 10.5 130 5 25 10 20 41.6 11.5 14 8 PA N PB PW M JK L LD P J MM NN HT Model HS REAL15 REAL20 REAL25 REAL32 REAL40 95 5.6 8 7.5 45 70 75 9.5 M8 x 1.0 M5 x 0.8 M5 x 0.8 25 21 M6 x 1.0 10 90 120 10 50 10 86 5.6 Rc 1/8 M6

Table of Contents

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 152 175 185.5 141 162.5 173 130 150

Series SY offers major advances in valve performance for cost-effective solutions to your requirements. The series offers high flow with low power consumption in a compact design. The SY is available in body ported or base mounted styles and can be used individually or manifold mounted., MANIFOLD, VALVE, SS3Y1 MANIFOLD SY100, 1J, SS3Y1 OTHER SIZE RATING, .07588 lb

Title not found

M6x1 M5x0.8 M3x0.5 1/4-28 10-32 1/8 NPT M8x1.25 M6x1 M5x0.8 M3x0.5 1/4-28 10-32 1/8 NPT M8x1.25 M6x1 M5x0.8 M3x0.5 1/4-28 10-32 M8 to 1/8FL M8 to M8FL M8 to M6FL M8 to M5FL M8 to M3FL M8 to 1/4-28FL M8 to 10-32FL M6 to 1/8FL M6 to M8FL M6 to M6FL M6 to M5FL M6 to M3FL M6 to 1/4-28FL M6 to 10-32FL M5 to 1/8FL M5 to M8FL M5 to M6FL M5 to M5FL M5 to M3FL M5 to 1/4-28FL M5 to 10-32FL 1/8 to

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

section 0.34mm2 Manual override 42 36 3 SX VK 69.5 (Metal seal) 67 (Rubber seal) (47.5) VZ VF SMC VFR 46.5 40.5 VP7 R1 R2 A, B port 20 14.6 12 10 10 P VP4 PE port 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 13.4 13.4 1.1 M5 X 0.8 External pilot port (Only external pilot style(R)) VQ VQ4 VQZ 0 1 M plug connector (M): VQZ115 (R)lMl01 L plug connector

CY1

NN M10 x 1.0 M10 x 1.0 M10 x 1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 A (2) L3 H (1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS120-M5 M5 x 0.8 M5 x 0.8 8 10 28.3 10.3 9 9 25 22.2 25.5 AS120-U10/32 10-32UNF 10-32UNF AS220-01 30.5 13.2 14.3 14.6 32.4 27.4 12 (12.7) 35.5 18 1/8 1/8 AS220-02 35.3 17.5 18 19.5 34.8 29.8 17 (17.5) 27.2 40.3 1/4 1/4 AS320-03 40.8 19.7 22.5 24.3 40.6 35.6 19 30 45.8 3/8 3/8 AS420-04 42.4

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Air Cylinder

Bore size A1 H MM ZZ 20 8 10 M4 x 0.7 86 25 8 10 M5 x 0.8 86 32 12 10 M6 x 1 88 40 13 10 M8 x 1.25 114 H ZZ + Stroke (mm) DBore size Stroke range A AL B1 F FF FX GA GB H H1 I KB MM N ND P S ZZ 20 1 to 150 18 15.5 13 30.4 M5 x 0.8 depth 9 22 22 8 27 5 28 8.2 M8 x 1.25 24 20 0 0.033 1/8 76 103 25 1 to 200 22 19.5 17 36.4 M6 x 1 depth 11 26 22 8 31 6 33.5 10.2 M10 x 1.25 30 26 0 0.033 1/8 76

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

SZ3000

They can be ordered in multiples of 10 pieces.

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAL23-M5 15 9.6 16 15.5 M5 0.8 M6 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 1 8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

: One-touch fitting for 4 C6: One-touch fitting for 6 10 10 (2) M5: M5 thread 53 13.8 6 A 2 10 16 4.3 2-3.2 mounting hole 24.5 7.8 (For C3, C4, C6) (For M5: 5.7) Manual override Cover dia. 1.6 Cross section 0.34 mm2 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com