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Tube insertions: a) Insert end of tubing into fitting until it bottoms. b) Pull on tubing to verify that it is properly retained. 2. Tubing disassembly: a) Be sure the air system pressure has been reduced to zero (0 psi) before attempting to remove the tubing. b) Simply push the tubing into the fitting c) Press and hold the release button against the body. d) Then remove the tubing. 3.

8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1: -1 : 2) : : : 1. 2. 3. 1. 2. 3. 4

For driving air operated valves for fluid control N.C N.O N.C N.C Air operated style fluid control valve Vacuum valve Vacuum pad A, B 1(P) A, B 1(P) A, B 1(P) A, B 3(P) 3(R) 3(R) 3(R) 1(R) Vacuum releasing air Atmospheric pressure or micro pressure The characteristic values shown in the catalog are representative values, not warranting the performance. 4-3-1 2 Series SY100 Precautions Be

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when work piece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when work piece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the work piece for a few times. The optimum values will be set automatically.

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

How to determine the auto switch installation position MHZ2 Step 2) Insert auto switch into the switch installation groove from direction B. "Set up as directed with power connected under no pressure or low pressure." A B MHZJ2 MHQ Step 3) Slide the auto switch in the direction of the arrow until the light illuminates.

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2- / 1 1.5 *3) *3) 1 1 () 3- IR3000 (1) 0.2%F.S (IR3000:F.S.=0.2MPa,IR3010:F.S.=0.4MPa,IR3020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa IR3000 IR3010 IR3020 [MPa] MAX. 1.0 [MPa] () 0.1 [MPa] 0.010.2 0.010.4 0.010.8 0.2% 0.5% 11.5l /min(ANR) [1.0MPa ] -560 Rc1/4,3/8,1/2

robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM (

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E--Bracket dimensions----INA-11-4041 4, 3 8, 1 28017015

Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D E(Option)Model Port size A B C D EFG H JK--INA-11-4053/48518020

Especially when the switch supports piping, do not apply a load of 15Nm or more to the metal part of the switch. 11. Provide a section of straight pipe of at least 8 times the pipe diameter in the piping before and after a switch.

Stainless Steel (mm) A B C D E F G H J L Bracket part no.