Part Number: No auto-switch (no built-in magnet), Number Of Switches: No switch, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External: 1.3 × 10^-11, Seal Change Location: None, Length of Lead Wire for Switch(m): -

(no built-in magnet), Number Of Switches: No switch, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External: 1.3 × 10^-11, Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): -, Heater Yes/No: None

(no built-in magnet), Number Of Switches: No switch, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External: 1.3 × 10^-11, Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): -, Heater Yes/No: None

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 150, Switch Part Number: No auto-switch

(no built-in magnet), Number Of Switches: No switch, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External: 1.3 × 10^-11, Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): -, Heater Yes/No: With heater for 120℃

Number: No auto-switch (no built-in magnet), Number Of Switches: No auto switch, Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

Number: No auto-switch (no built-in magnet), Number Of Switches: No auto switch, Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

Switch Part Number: No auto-switch (no built-in magnet), Number Of Switches: No auto switch, Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

, Switch Part Number: No auto-switch (no built-in magnet), Number Of Switches: No auto switch, Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

, Switch Part Number: No auto-switch (no built-in magnet), Number Of Switches: No auto switch, Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

Switch Part Number: No auto-switch (no built-in magnet), Number Of Switches: No auto switch, Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

, Switch Part Number: No auto-switch (no built-in magnet), Number Of Switches: No auto switch, Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

, Switch Part Number: No auto-switch (no built-in magnet), Number Of Switches: No auto switch, Seal Material: FKM (1349-80), Amount of leakage(Pa·m³/s): 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)

), Number Of Switches: No switch, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External: 1.3 × 10^-11, Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): -, Heater Yes/No: None

), Number Of Switches: No switch, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External: 1.3 × 10^-11, Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): -, Heater Yes/No: None

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 32, Motor Type: T7 (200W Output, Absolute Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 150mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm