SMC Corporation of America
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D The air in the cylinder initially opens the piston valve and the check valve and discharges rapidly through the switching valve. The fully opened piston valve closes as shown in Fig. D when the pressure in the cylinder is lower than the set pressure. Then the air passes through the check valve and becomes discharged (Fig. D).

Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 inputs Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

PFMC7501 Item Default settings [P_1] Set value of OUT1 250 L/min [H_1] Hysteresis of OUT1 25 L/min [P_2] Set value of OUT2 250 L/min [H_2] Hysteresis of OUT2 25 L/min PFMC7102 Item Default settings [P_1] Set value of OUT1 500 L/min [H_1] Hysteresis of OUT1 50 L/min [P_2] Set value of OUT2 500 L/min [H_2] Hysteresis of OUT2 50 L/min PFMC7202 Item Default settings [P_1] Set value of OUT1 1000

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate L/min (ANR

Rc C2SF-CJ-D G C2SFF-CJ-D NPT C2SFN-CJ(Z)-D Rc C2SF-J-D G C2SFF-J-D NPT C2SFN-J(Z)-D Appearance and part No. Semi-standard: 6CJ Semi-standard: 6J Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No.

Rc C2SF-CJ-D G C2SFF-CJ-D NPT C2SFN-CJ(Z)-D Rc C2SF-J-D G C2SFF-J-D NPT C2SFN-J(Z)-D Appearance and part No. Semi-standard: 6CJ Semi-standard: 6J Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No.

Product weight [kg] Model Stroke Additional weight with lock Size 50 75 100 150 8 1.06 1.23 0.16 16 1.87 2.26 0.32 25 3.50 4.10 4.90 0.61 -5- 1.3 Construction LESYH*R / LESYH*L R type as shown L type opposite as shown Case of D type Component parts No. Description Material Remarks No.

Bowl assembly / auto drain for AF40, 50, 60-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: (Standard) Semi-standard: J Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No. Rc Rc C4SF-J-D C4SF-D G G C4SFF-J-D NPT C4SF(-Z)-D NPT C4SFN-J(Z)-D Appearance and part No.

D 3 Set the test operation select switch to the Up Position, when performing the test operation mode by using set up software (MR ConfiguratorTM) E 2 F 1 0 (Note) This table indicates the status when the switch is set to "Down".

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

JOG operation positioning operation programmed operation DO forced (Note 4) 0 0. b output single-step feed (Note 4) Test operation mode # #. d (Note 1) Motor-less operation # #.

5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8

5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 14-18-10 11 Series IDUS/IDFS Specific Product Precautions 1 Be sure to read before handling.

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

G D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ G D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V Transmission line Transmission line Black White Brown Blue Crimped connector SL-J1A Main transmission line Transmission line 24V 0V Power supply{ 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ Special

, D-F8P, D-F8B Auto Switch Specifications Grommet D-F8P D-F8N D-F8B Auto switch part no.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.