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The details of each indication are explained in (2-1) to (2-3) below. (2-1) Status of the connected actuators (2-2) I/O type (2-3) Status of input and output signals (2-1) Status of the connected actuators The status of the connected actuators is indicated.

No.SFOD-OMT0011CN-A (1-4-2) I/O I/O I/O I/O [] a) switch b) I/O I/O OK (EMGx) EMGx No.SFOD-OMT009 14 No.SFOD-OMT0011CN-A (1-5) Stop (1-6) (1-7) (1-8) PC communication status Online 15 No.SFOD-OMT0011CN-A (2) (2-1)~(2-3) (2-1) (2-2) I/O (2-3) (2-1) (2-2) I/O I/O I/O (NPN) NPN I/O (PNP) PNP I/O PC 16 No.SFOD-OMT0011CN-A 2-3 (2-3-1) BUSY1-BUSY4 BUSY ONOFF AREA1-AREA4

Specifications (2 port solenoid valve) Refer to "Option/Part number" (page 13) or the catalogue of the standard 2 port solenoid valve for the detailed specifications of models other than X276. -16No.PS-OMR0002-K 2 About this product Characteristics graph Supply pressure dependence characteristics The detection distance for turning ON the output depends on the supply pressure.

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P19 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4. Made to order product (XC85, X446) P27 4-1.

P4 1-1. 2. P4 2-1. 2-2. 2-3. 2-4. 2-5. 2-6. 2-7. 2-8. 3. P18 3-1. 3-2. 3-3. 3-4. 4. (XC85,X446) P25 4-1. 4-2. PTFE 5. P26 6.

22.5 22.5 L = 1/4 23.5 15 30.5 45 3/8 27 EA EB P 1/2 30.5 49.5 1/4, 3/8,1/2 P PORT 152.5 165.5 ALL DIMENSIONS ARE IN MILLIMETERS 11 Series VS R8b S ISO SIZE 2-3 SUB-BASE VS8w 03/04/06/10w SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 2 PORTS A,B, PORTS 2-1/8 PILOT EXH PORTS A A B A B C SIZE 2 7 SIZE 3 9 2 MOUNTING HOLES SIZE 2 3/8 SIZE 3 1/2 5 PORTS D D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR

Seat material Material Code Material PCTFE (Standard) Vespel 2) No code VS Code Body material 316L SS secondary remelt Hastelloy C-22 S H 2) Not available with H material.

OUT2 2 [ 2_P] Normal output [ 250] 250 L/min (PFMC7501) [ P_2] Set value of OUT2 2 [ 500] 500 L/min (PFMC7102) [F 2] page 37 [ 1000] 1000 L/min (PFMC7202) [ 25] 25 L/min (PFMC7501) [ H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMC7102) [ 100] 100 L/min (PFMC7202) [F 3] [ r ES] Response time [ 1.0] 1 second page 42 [F10] [ SUb] Sub display [ oUt] Set value page 43 [F20] [ inP] External input

VP3185DZA1-X81 MAX.10 160.3 6 140 87.4 26.5 EXH.1 56 76 81 EXH.2 105 (Non-locking) Manual override Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-13 Mounting hole EXH 243.1 250.7 PA PE 159 166 150 140 105 90 IN EXH OUT 62 52 25 (EXH port) Rc 2 118 41 41 2-Rc 1 1/4, 1 1/2, 2 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned

Nominal thread size Required torque Port size Width across flats of attachment Rc1NPT1 36 to 38 Nm 1 45 mm Rc1 1/2, NPT1 1/2, Rc2, NPT2 48 to 50 Nm 1 1/2 60 mm 2 70 mm 16 No.PF-OMU0002-D Wiring Connection Connections should only be made with the power supply turned off. Use a separate route for the product wiring and any power or high voltage wiring.

This can be prevented by inserting a noise filter such as a line noise filter and a ferrite element between the switch-mode power supply and the pressure switch, or by using a linear power supply instead of a switch-mode power supply. 3 1 DC polar indication 4 2 2 OUT2 3 DC (-) 1 Connector on the body Connector pin numbers 4 OUT1 3 1 DC (): Brown 4 2 2 OUT2: White 3 DC (): Blue 1 4 OUT1:

No.PF-OMM0004-D / / PF3W7## SMC 2 11 13 14 16 17 19 21 24 26 26 F1 OUT1 60 F2 OUT2 36 F3 42 F10 43 F20 47 F22 48 F30 50 F80 51 F81 52 F82 53 F90 54 F98 55 F99 56 57 61 61 65 65 71 79 81 88 -1No.PF-OMM0004-D (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

1 Low Differential Pressure Sensor Series PSE550/300 ZSE ISE PSE Rated differential pressure range: 0 to 2 kPa 0 to 2 kPa 0 to 2 kPa Z I SE3 PS Accuracy: 1% F.S. Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1% F.S. 1% F.S.

16DD-M9(W,A)V D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41 / 3 NPN 3 PNP PLC PLC 2 2 PLC PLC PLC PLC -13- AND(),OR() *50ms 3 NPN OR 3 NPN AND 1 1 1 2 2 2 3 PNP AND 3 PNP OR 1 1 1 2 2 2 2 AND 2 OR 2 AND ON , 2 ON 20V 2 OR OFF OFF 1 1 ON 2 2 ON =-2 OFF =2

The data set by auto preset function is fine turned. 13 For General Fluids High Precision Digital Pressure Switch Series ZSE F/ISE 50 60 50 60 Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Initial setting 1. Initial setting mode 2. OUT1 output mode selection 3. OUT2 output mode selection SET Press the SET button. Press the SET button at least 2 seconds.