OML0002-C

How to Order IZN10 01 P 06 Z B1 IZN10 High frequency AC nozzle type Series name Nozzle shape NIL 01 02 11 Piping female Note 1) Rc1/8 Type Energy saving charge elimination nozzle Large flow nozzle Output specification NIL NPN P PNP Piping diameter 06 f6: metric 07 f6.351/4"): inch 16 f6: metric (elbow) 17 f6.351/4"): inch (elbow) Power supply cable NIL 3m Z 10m N Not provided Bracket NIL

Manifold Regulator ARM1000/2000 Series

Note 4) When a regulator is not mounted on the manifold, use the following blank plate assembly (with mounting screws and O-ring) For ARM1000: Part no. 136114A For ARM2000: Part no. 136214A VBA VBAT AP100 ARM2000-4A2-01G Option / Pressure Gauge: G15-10-01 How to Order Symbol Individual IN Common IN G15 10 01 IN 1 Max. display pressure OUT IN 2 1 OUT 2 10 1.0 MPa Not able to set the pressure

BP1000

47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

Vacuum Unit

How to Order Manifold w r q e ZZK2 A P 2 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations w System/Port e Supply valve and release valve wiring1 Symbol System Port Symbol Stations 01 1 station 02 2 stations Symbol Wiring Selectable wiring for manifold r (Refer to page 16.)

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

Hand Valve Series VH

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

CLQ

(mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Compact Cylinder

Type A mounting bracket YA-03 Joint YU-03 RS T2 V M W Joint Joint/Mounting Bracket (Type A/B)/Part No.

Compact Cylinder with Air Cushion

YA-03 Joint. YU-03 Joint part no. RS M W V T2 Applicable mounting bracket Bore size (mm) Weight (g) Joint 2D through 2O counter bore T1 B E J A type mounting bracket B type mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Carbon steel (nickel plated) mm 80 YU-08 YA-08 YB-08 90 100 YU-10 YA-10 YB-10 160 Bore size (mm) Part no.

LVQ

class 2 3 4 5 6 Type of part 5 Symbol U B N Type of part Nut & insert bushing Insert bushing Nut LQ1 LQ2 3 6 LQ1 LQ1 For pilot port Tubing size Body class LQ1 1 U 03 LQ1 Tubing O.D. 1/8" (3) 4 Body class Symbol 1 Body class 1 Symbol 03 04 Applicable fitting LQ1 1 Type of part Note) Cannot change to tubing of different diameter.

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

Digital Flow Switch (Manifold type)

A Symbol Flow adjustment valve Stop valve Nil 61.9 S 61.9 Nil P 95.9 W 95.9 0.5 to 4 L/min 3/8 (symbol 04) (symbol 03) Nil 72.9 S 72.9 Yes P 106.9 Remote sensor/ W 106.9 Integrated display type Nil 65.9 S 65.9 Nil P 99.9 3/8 W 99.9 (symbol 03) 2 to 16 L/min 1/2 (symbol 20) Nil 76.9 (symbol 04) S 76.9 Yes P 110.9 W 110.9 B: Total length of the supply unit (mm) Unit construction

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

Compact Cylinder with Lock Series CLQ

Type A mounting bracket part numberYA-03 JointYU-03 2 x O depth of counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part no.

Compact Cylinder with Air Cushion Series RQ

YA-03 Joint . YU-03 CQ2 RS RQ T2 V M W CQM Joint and Mounting Bracket (A and B Types) Part No.

NCQ2/CQ2

Type A mounting bracket YA-03 Joint YU-03 Type B Mounting Bracket RS Joint/Mounting Bracket (Type A/B)/Part No.

Compact Cylinder with Lock Series CLQ

(mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Compact Cylinder with Air Cushion Series RQ

Applicable mounting bracket Bore size (mm) Joint 55 6 18 56 YA-03 32, 40 A type mounting bracket B type mounting bracket 100 8 22 67 YA-05 50 YA-03 YB-03 32, 40 YU-03 YA-05 YB-05 50 YU-05 B type mounting bracket Allowable eccentricity mm Bore size 32 40 50 1 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.