Series: VQZ3000, Composite Symbol: 3 Port N.C., Seal Type: Metal Seal, Function: Standard (0.35W DC, AC), Coil Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: -, Q: -
Series: VQZ1000, Composite Symbol: 2 Position Double, Seal Type: Rubber Seal, Function: External Pilot, Coil Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: -, Q: -
Series: VQZ2000, Composite Symbol: 2 Position Single, Seal Type: Rubber Seal, Function: High Speed Response 0.9W - DC Only, Coil Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: -, Q: -
Series: VQZ1000, Composite Symbol: 3 Position Exhaust Center, Seal Type: Rubber Seal, Function: External Pilot, Coil Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: -, Q: -
Series: VQZ3000, Composite Symbol: 3 Position Exhaust Center, Seal Type: Metal Seal, Function: High Speed Response 0.9W - DC Only, Coil Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: -, Q: -
Series: VQZ1000, Composite Symbol: 2 Position Single, Seal Type: Rubber Seal, Function: High Pressure 0.9W - DC Only, Coil Voltage: 24VDC, Lead Wire: M Plug w/o Connector, Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: -, Q: -
Series: 1 (VQZ1000), Composite Symbol: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: KR (High Pressure 0.9W - DC Only, External Pilot), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: No
Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 75mm, Thread: F (Female Rod End), Suffix for Cylinder: w/o Rod Boot
AU AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
35 CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body size Thread type (3) 2B 4B 8B 11B 22B 37B 75B Nil Rc F G N NPT Accessory (Option) A With drain cock (1) Note 3) Corresponds to attachment symbols C, D, and J. Select according to the type of threads used on the body.
588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Rc 1/8 Pilot air port port (Stop valve side) Rc 1/8 Pilot air port port (Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F
This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD
Series ASD * * * F-D Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting. Specifications. How to Order . Construction.
Flow control valve (With pressure compensation) Enables constant movement even if there are load fluctuations. 4.12-6 Air-hydro Unit Series CC Hydro Unit MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B ML1C REA REC RHC MTS CC mm Mode Air port size Rc (PT) Oil port size Rc (PT) A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M 3/8 1/2 186 104 64 86 88 53 121.8 151.5 98 35 18 35 104 45 86 45 83 60 CC63-lSl1-
Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part
Front panel Terminal connection screw: M5 (tightening torque: 2.6Nm) Crimp terminal width: 9.5mm or less) Applicable wire: 1.25mm2 or greater (to be connected to the user's equipment) L01,L02,L03Power supply Leakage display button Test button (gray) Earth leakage breaker with case 4) Connect the ground line.
) AC100VAC200V 2005 2505 26010 g AC230V 2305 2705 29010 Rc3/8 Rc1/2 Rc3/4 mm 10 1 2 kg 23 27 28 () kW 2.2 3.7 5.5 1ANR2065% 2 330mA 4() IDU Series 6-1 6 1 IDX-OM-W014 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDU Series 6-2 GWP 6 2 IDX-OM-W014 6 6-3 Q E D A B P G [AC200V] C F
g 2805 2905 35010 Rc3/4 Rc1 10mm 1 2 kg 44 47 71 kW 7.5 11 15 1ANR 2065% 2 3 30mA 4() IDU Series 6-1 6 2 IDX-OM-W023 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDU Series 6-2 GWP 6 3 IDX-OM-W023 6 6-3 A B E D Q Guige Guige G C Guige Guige [AC200V] [AC200V] Guige Guige F