AWM20 to AWM40

0 50 100 0 0 100 200 150 300 0 0 500 1000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AWD20 Rc 1/4 AWD30 Rc 3/8 AWD40 Rc 1/2 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 100 200 300 400 500 0 0 50 100 0 0 100 200 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow

AWM20 to AWM40

0 50 100 0 0 100 200 150 300 0 0 500 1000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AWD20 Rc 1/4 AWD30 Rc 3/8 AWD40 Rc 1/2 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 100 200 300 400 500 0 0 50 100 0 0 100 200 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow

17

0 0 0 20 40 60 0 50 100 150 200 Load from lateral direction (N) Load from lateral direction (N) MGPA25 MGPA100 0.6 Plate displacement amount (mm) Plate displacement amount (mm) 0.7 MGPA100-400 0.6 0.5 MGPA25-400 MGPA100-300 MGPA100-250 0.5 MGPA25-300 0.4 0.4 MGPA100-200 MGPA100-150 0.3 MGPA25-200 0.3 0.2 MGPA25-150 MGPA25-100 0.2 MGPA100-100 0.1 0.1 MGPA100-50 MGPA25-50 0 0 0 20 40 60 80

High Power Cylinder Series RHC

Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95 20 10 25 63 30 90 116 40 37 250 to 1000 100 80-0.074 J ZZ P 6.8 to 11.3 WH 305 S 1/2 H1 58 NF 215 NE 24 ND 25 MM 27.7 K M18 x 1.5 JC 7 I Bore size (mm) 50 11 75 M10 x 1.5 thread depth

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 u !0 !2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

ITVH

to 50C (No condensation) Weight Approx. 630 g (without options) 0 0 100 Input signal [% F.S.]

Gun Type Ionizer

The specified ambient temperature range is 0 to 40C.

Micro-Mist Separator with Prefilter Series AMH

---I -~ _:_::-::: : ::-0.7ipa ~,,:-~~.'. "". 0~~1~00 ~~2~0~~~ ~ 0 30~0-4~OLO-~50~0~~60~0 0 1500 3000 4500 6000 7500 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH350 AMH850 0.5MPa )7MPa I I // ",0.06I-Air pressure 0.3MPa '" 0.06 Inlel air pressure 0.3MPa / a. V o/pa ~pa ::;; a. V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

0 !1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

reduces flow setting time

0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

to 5 mm on one side only 0 to 6 mm on one side only Rubber stopper 0 to 3 mm at both ends Stroke adjustment range 0 to 5 mm at both ends 0 to 4 mm at both ends Metal stopper +1 0 Stroke length tolerance mm 11-: Fluorine grease Grease 22-: Lithium soap based grease Class 3 Class 3 Without adjuster Cleanliness class (ISO class) Class 4 Class 4 Rubber stopper Class 6 Class 6 Metal stopper

7

A VXD2 Z 1A VXD2 Z 3 0 A A VXK Enter standard product number.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

Fieldbus system IO-Link Master Unit

When the process data size of the connected device and mapping size of the master communication process data are different (E.g.: connected device process data size: 10-byte, mapping size: 16-byte) Parameter Data construction direct 0x0123 4567 89AB CDEF GHIJ 0 0 0 swap 16bit 0x2301 6745 AB89 EFCD IJGH 0 0 0 swap 32bit 0x6745 2301 EFCD AB89 0 IJGH 0 0 swap All 0x0 0 0 IJGH EFCD AB89 6745

JXCx-OMU0004

P.50 34 No.JXC-OMU0004-A 7.3 SW (A) (B) PLC PLC SW (C) A,B,C A B C I/O I/O I/O 35 No.JXC-OMU0004-A A e i j PLC h 15 8.1 P.40 8.4 P.43 36 No.JXC-OMU0004-A B PLC I/O PLC PLC PLC PLC 3 i j 3 PLC PLC PLC PLC I/O g 7 LED f L L (1) 7 LED f (2) (3) 3 k n c 37 No.JXC-OMU0004-A C h [15] g 2 i j i h j g i 2 j i i h [0] j j 3 g 3 i OFF j 3 2 e h 0 h i g 3 j

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

0, !

Plug-in/Plug Lead: Single Unit

Series VQ5000 Base mounted Base Mounted Plug-in/Plug Lead: Single Unit Model Response time (ms) Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9