Series 10-SV ® EX500 Decentralized Serial Wiring

Tie-rod base SS5V 10 1 A2W W D 05 U 10S Cassette base SS5V 10 W U D 05 16S 1 A2W Clean series DIN rail length specified Enclosure IP67 Standard length Nil 3 Series For 3 stations Specify a longer rail than the standard length. 1 2 10-SV1000 10-SV2000 16 For 16 stations SI unit 0 Without SI unit DeviceNet/PROFIBUS DP/ EtherNet/IP A2W Valve stations P, E port location Symbol 02 Stations

ITV

(Maximum 10 stations) Example) IITV00-05-07 Stations IITV00-031 set (Manifold part no.)

Air Suction Filter With One-touch Fittings

How to Order Metric size (Release button: Light gray) Metric size ZFB 0 Inch size ZFB 1 Body type Symbol Filtration area (mm2) 10 1037 20 1584 30 1980 40 3016 Inch size (Release button: Orange) Applicable tubing size Metric size Symbol Applicable tubing Applicable model ZFB10 ZFB20 ZFB30 04 4 06 6 08 8 10 10 Inch size Symbol Applicable tubing Applicable model ZFB10 ZFB20 ZFB30 ZFFB40 05

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

Tie-rod base SS5V W 1 A2W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A2W Enclosure IP67 specifications DIN rail length specified Series Standard length Nil 3 SI unit 1 2 SV1000 SV2000 Specify a longer rail than the standard length.

Flow Sensor Series PFMV

P1 P2 P1 P2 Vacuum source (Vacuum pump) Nozzle Nozzle Note) Since the calculated value may not meet the approximate value due to leakage and pressure loss in the piping system, please check the result by using actual equipment. 950 Flow Sensor Series PFMV5 How to Order PFMV5 05 1 Option (shipped together) Measurement flow range 05 10 30 05F 10F 30F Nil 0.0 to 0.5 l/min None With L-type bracket

Manifold Specifications

Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19. 13-6-2 Vacuum Ejector In-line Type Series ZU How to Order ZX ZU 05 S ZR ZU07 ZM Maximum vacuum pressure S 85 kPa ZH L 48 kPa ZU05 ZU Nozzle diameter 05 0.5 mm ZL 07 0.7 mm Circuit diagram ZY EXE ZQ Specifications

Clean Regulator/Fluororesin Type

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 04 06 08 10 12 19 03 05 07 11 13 19 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

Body Size: 05 (400 L/min. 14.1 scfm), Thread Type: Body Size 05: M Thread; Body Size 10-40 R Thread, Port Size: M5 (M5 x 0.8)

Digital Flow Switch

Part number Description Note ZS-33-D Lead wire with connector Length: 2 m ZS-33-F Connector cover Silicone rubber ZS-42-C Bracket With mounting screws for PFMB7501/7102 (4 pcs. with nominal diameter of 3.0) ZS-42-D Bracket With mounting screws for PFMB7202 (4 pcs. with nominal diameter of 3.0) -10No.PF-OMP0002-H Summary of Product parts Body Name Description Display 1 See below.

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PFxx-OMS0001CN

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Low Profile 2/3-Port Solenoid Valve

)/ 0.7 W 10 VDC (Rated 42%)/ 0.7 W 5 VDC (Rated 42%)/ 0.7 W 10 VDC (Rated 42%)/ 0.7 W 4.2 VDC (Rated 35%)/ 0.8 W Holding*2 Holding voltage/ Power consumption *1 For use with fluids other than air or nitrogen, please contact your SMC sales representative. *2 Please make sure the coil surface temperature does not exceed 80C.

HRX-OM-W060

Table 8.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC HRL Series 8.7 Standards 8-13 HRX-OM-W060 Chapter 8 Documents Mfg. code For information about how to perform daily checks of the thermo chiller, refer to section 7.2.1 Daily check of the operation manual.

HRX-OM-Y098

Pressure setting for pressure control function 0.10 to 0.50 MPa (5) PressLimit Function disabled 0.50 MPa Function enabled By default 5.4 Description of the Screen HRL Series 5-42 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions Discharge pressure alarm (AL21/AL23/AL24/AL26) 5.

IP8001 Series

Hold down again for 1sec. or longer after interval No.IP8S-OM09 59 Mode button 1s Set button 1s or Mode button 1s Set button 1s or Mode button 1s Mode button 1s Set button Set button 1s 1s Fig. 42-1 Mode button 1s Set button 1s or Lower limiter Upper limiter Fig. 42-2 Mode button 1s Set button 1s Alarm setting Fig. 42-3 No.IP8S-OM09 60 Possible to select set alarm 2 mode(on

JXCx-OMU0004

(P.50) (1) M 41 No.JXC-OMU0004-A 2 * M (3) () M () ON M 42 No.JXC-OMU0004-A 8.4 1 1 1 1 1 1 1 10.

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

Digital Flow Switch

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PFMC7501/7102 (M3 x 5, 2 pcs.)

Compact Guide Cylinder

Theoretical Output OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 12 6 OUT 113 23 34 45 57 68 79 90 102 113 IN 85 17 25 34 42 51 59 68 76 85 16 8 OUT 201 40 60 80 101 121 141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165