Cylinder

1ode ' , AI fll I j>~[IH'~ I'L l 1-, MM UI INX Al l A, Model JIlor. siz;'4!!1! "041 8 , NO';'o I,LI L, " MM U, I i:/X I f!> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o !

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

Electric Actuator / Low profile slider type

Part name Qty (1) Electric actuator / Low profile slider type 1 (2) Controller 1 (3) Power supply plug 1 (4) Actuator cable 1 (5) I/O cable (Not use in this section) 1 (6) Teaching box 1 (7) Controller setting kit [The controller setting software, The communication cable, USB cable and conversion unit are included.] 1 Table 2.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

EXxx-OMN0037CN

5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -31No.EX-OMN0037CN-A -32No.EX-OMN0037CN-A EX600-AM B M12 (5 )4 2 2 M12 (4 ) No. 1 LED 2 () 3 () 4 5 6 () -33No.EX-OMN0037CN-A 1 24 V() 24 V() 2 + 3 0 V() 0 V() 4 0 V() 5 FE FE 1M12 (4 ) 1 1 24 V NC 2 2 A/D DC24 V D/A DC24 V 3 34 0 V 0 V 4 5 FE FE 5 FE FE 100 k 250 1

Air Pilot Operated

(4) N\6A 4 0 34 01 = Mounted on Individual Subplate 3/8'NPTF Sid Ports (5) 02 = Mounted on Indivldual Subplate 1/2" NPTF Side Ports (5) 52 = Mountad on Individual Subplate ' 1/2' NPTF Side Ports (5); 10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate 3/8" NPTF Side Ports (5); Bottom Ports (5) 3t = Mourted on Stacking Manifold Block.3/8" NPTF Side Ports (4) a3 = Mounted on Stacking

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

13

16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01

Title not found

4 18 Nol a\railable with pre$ure range 1 I "-40" inplt ouFut combination not avaibble Slandard soecilication CE marked 1. 17. 18. 19 For man old mountino 2 , 3 . 1 5 CE marked DeviceNet comoatible 4, 5. 6.8. 14 CE marked 16 preset tvpe 4. 5. 7, 10 DeviceNet compatible 5, 6.8, 14 1 6 preset type 5,7.10. 16 0.1s hiqh speed response Digital input type 5. 6. 9. 11 Reverse output 12,13 CE marked

LEF-OM006xx

10m 1.5 1 1.5 1 A A m 1000 10 00 mm 1000 15m 15m 3m 3 3 B B 3 20m 20m 5 5m 5 C C 5m 100 100 200 200 300 300 500 500 600 600 700 700 400 400 800 800 900 900 1000 1000 LEFS16 LEFS16 LEFS25 LEFS25 ( R R LEFS32 LEFS32 S S LEFS 40 LEFS 40 LEFB 25 T 6N 1 1 5 00 DIN /O 16 16 25 25 32 1.5m 1 32 1 3 3m 3 5 5 5m ( DC24V ( DC24V A A NPN NPN 6N LECP6/LECA6 6N LECP6/LECA6 ( PNP

IDX-OM-W028

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly. 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Chapter 6.

IZx-OMX0087

Function 4-1. Name of Parts 4-1-1. Controller 1)IZTC41 For IZTC41-L, refer to the IO-Link dedicated instruction manual. 1 2 3 4 5 6 14 7 8 13 12 10 9 11 Table4. Name of parts No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

DD 11-9-19 20 Series MSQ Construction #1 oi @7 @8 t !0 y !6 !7 !8 !1 @5 er w@4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MSQ R (With internal shock absorber) @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

Air Slide Table Series MXP

Nil 6 5, 10 S 1 pc. 8 10, 20 n n pcs. In the case of MXP6-5, with 2 auto switches are available for DM9 type and D-M9V type only.

CG1

1 !2 !3 !4 !5 !

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Tie-rod Type Hydraulic Cylinder

7 i q @0 w y @1!8t @2 q !1 !0!3 o r !4 !5 !9u !2 CHM CHS CH2 CHA CHA @0 Related Products D40 Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

Multi-channel Digital Sensor Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0: