+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.
Metric size 3.2, 4 6, 8, 10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note) Flow rate values are at a pressure of 0.5 MPa and
H I J K L 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4 ( 0 3 . 6 1 ) 8 2 4 ( 5 8 . 6 1 S I 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4 ( 0 3 . 6 1 ) 8 2 4
/4 2 7/8 3 3 1/4 3 1/2 3 3/4 4 4 1/2 5 5 1/2 6 1/4-20UNC-2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 1/2 3 3/4 4 4 1/4 4 3/4 5 1/4 5 3/4 6 1/4 2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 3/8 3 5/8 3 7/8 4 1/8 4 5/8 5 1/8 5 5/8 6 1/8 2 7/8 3 3 1/8 3 1/4 3 3/8 3 1/2 3 5/8 3 7/8 4 1/8 4 3/8 4 5/8 5 1/8 5 5/8 6 1/8 6 5/8 1/4-20UNC-2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 3/8 3 5/8 3 7/8 4 1/8 4 5/8 5
Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A / COM B-3 Blue 4 COM-B / A-3 A 10m *1) Shield B 15m *1) Cable color Terminal no. Vcc B-4 Brown 12 C 20m *1) GND A-4 Black 13 A B-5 Red 7 A A-5 Black 6 *1) Produced upon receipt of B B-6 Orange 9 order B A-6 Black 8 3 Only Robotic type cable can be selected. Red 4 signal Terminal no.
2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20
6 4 4 0 0 19 6 2 2 (4.5) 2 25 7.5 7.5 2.5 10 10 6 3.5 1.5 (1) 6 3.5 22.5 9.5 27 11 11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.
9 6 9 6 9 6 9 6 9 IN IN IN 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Right Right Left Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NPL-1D1 set (1 station manifold part number
8)1 65 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4, 6, 8)1 105 + 100 (n 2) (n = 2, 4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface
d o M A B C D E F G H I J K L 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4 ( 0 3 . 6 1 ) 8 2 4 ( 5 8 . 6 1 S I 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4
TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL
B-1 A-1 B-2 A-2 B-3 A-3 Nil Cable color Circuit 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Vcc GND A A B B Brown Black Red Black Orange Black B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.
Message and Troubleshooting . 6-1 6.1 Error Message . 6-1 6.2 Troubleshooting . 6-2 Chapter 7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 7.3.2 Draining of facility water . 7-5 7.4 Periodic Replacement Parts
RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8
1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !
CNP3 CN2 CN4 Control circuit power supply connector Servo motor power connector 6 Battery 1 26 (14) 1 Battery included.
1 1 1 out of 2 evaluation, 2-channel non-equivalent Bit 3 Bit 2 Power source for cross circuit detection and Clock pulse for Ch.2 and Ch.6 (input connector 2) 0 0 Input 2 power source: UT1 with clock pulse Input 6 power source: UT2 with clock pulse 0 1 Input 2 & 6 power source: UT1 with clock pulse 1 0 Input 2 & 6 power source: UT2 with clock pulse 1 1 Input 2 & 6 power source: each power
OptionOptional Accessories . 6-1 6.1 Option B [Earth leakage breaker] . 6-1 6.1.1 Option B [Earth leakage breaker] . 6-1 6.2 Option J [Automatic fluid filling] . 6-1 6.2.1 Option J [Automatic fluid filling] . 6-1 6.3 Option L [Large capacity tank] . 6-2 6.3.1 Option L [Large capacity tank] . 6-2 6.4 Option T [High-pressure pump]. 6-3 6.4.1 Option T [High-pressure pump] . 6-3 6.5 Option V
Core wire color A-coded A-coded A-coded 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 7 1 8 3 2 8 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Socket pin arrangement Plug Socket pin arrangement Plug Connections Connections pin arrangement pin arrangement Item Specifications